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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076385680> ?p ?o ?g. }

• W2076385680 abstract "Hybrid lithography combining thermal nanoimprint with optical lithography is an effective means to prepare structures with differing geometries (nanometer, micrometer) over large areas, e.g., for sensor applications. For the realization of this technique, the suitability of photoresists for this process has to be investigated. In case of negative tone resists, the cross-linking induced or provided by exposure may be amplified in the imprint step due to heating times in the minute range. As cross-linking may impede the imprint, a subtle adjustment of the exposure dose with respect to the imprint temperature envisaged is required for successful processing. With an imprint temperature of 100 °C, good results for hybrid lithography could be obtained with two commercially available negative tone resists: ma-N 405 and ARN 4410. The latter could successfully be used for a subsequent liftoff. The best results were obtained when the resists were exposed before the imprint step." @default.
• W2076385680 created "2016-06-24" @default.
• W2076385680 creator A5007286757 @default.
• W2076385680 creator A5025818509 @default.
• W2076385680 creator A5030192962 @default.
• W2076385680 creator A5037243336 @default.
• W2076385680 creator A5064634763 @default.
• W2076385680 creator A5087901663 @default.
• W2076385680 date "2012-10-25" @default.
• W2076385680 modified "2023-09-27" @default.
• W2076385680 title "Cross-linking control during imprint for hybrid lithography" @default.
• W2076385680 cites W1985660168 @default.
• W2076385680 cites W1996575704 @default.
• W2076385680 cites W2008601268 @default.
• W2076385680 cites W2013083651 @default.
• W2076385680 cites W2026744023 @default.
• W2076385680 cites W2029497000 @default.
• W2076385680 cites W2034583148 @default.
• W2076385680 cites W2082983861 @default.
• W2076385680 cites W2088177488 @default.
• W2076385680 cites W2131419097 @default.
• W2076385680 cites W4233100450 @default.
• W2076385680 doi "https://doi.org/10.1116/1.4763357" @default.
• W2076385680 hasPublicationYear "2012" @default.
• W2076385680 type Work @default.
• W2076385680 sameAs 2076385680 @default.
• W2076385680 citedByCount "2" @default.
• W2076385680 countsByYear W20763856802013 @default.
• W2076385680 countsByYear W20763856802014 @default.
• W2076385680 crossrefType "journal-article" @default.
• W2076385680 hasAuthorship W2076385680A5007286757 @default.
• W2076385680 hasAuthorship W2076385680A5025818509 @default.
• W2076385680 hasAuthorship W2076385680A5030192962 @default.
• W2076385680 hasAuthorship W2076385680A5037243336 @default.
• W2076385680 hasAuthorship W2076385680A5064634763 @default.
• W2076385680 hasAuthorship W2076385680A5087901663 @default.
• W2076385680 hasConcept C105487726 @default.
• W2076385680 hasConcept C105795698 @default.
• W2076385680 hasConcept C120665830 @default.
• W2076385680 hasConcept C121332964 @default.
• W2076385680 hasConcept C136525101 @default.
• W2076385680 hasConcept C142724271 @default.
• W2076385680 hasConcept C159985019 @default.
• W2076385680 hasConcept C162117346 @default.
• W2076385680 hasConcept C163581340 @default.
• W2076385680 hasConcept C171250308 @default.
• W2076385680 hasConcept C171635847 @default.
• W2076385680 hasConcept C192562407 @default.
• W2076385680 hasConcept C200274948 @default.
• W2076385680 hasConcept C204223013 @default.
• W2076385680 hasConcept C204787440 @default.
• W2076385680 hasConcept C2777046567 @default.
• W2076385680 hasConcept C2779227376 @default.
• W2076385680 hasConcept C2781089630 @default.
• W2076385680 hasConcept C33923547 @default.
• W2076385680 hasConcept C41794268 @default.
• W2076385680 hasConcept C49040817 @default.
• W2076385680 hasConcept C53524968 @default.
• W2076385680 hasConcept C71924100 @default.
• W2076385680 hasConcept C77066764 @default.
• W2076385680 hasConceptScore W2076385680C105487726 @default.
• W2076385680 hasConceptScore W2076385680C105795698 @default.
• W2076385680 hasConceptScore W2076385680C120665830 @default.
• W2076385680 hasConceptScore W2076385680C121332964 @default.
• W2076385680 hasConceptScore W2076385680C136525101 @default.
• W2076385680 hasConceptScore W2076385680C142724271 @default.
• W2076385680 hasConceptScore W2076385680C159985019 @default.
• W2076385680 hasConceptScore W2076385680C162117346 @default.
• W2076385680 hasConceptScore W2076385680C163581340 @default.
• W2076385680 hasConceptScore W2076385680C171250308 @default.
• W2076385680 hasConceptScore W2076385680C171635847 @default.
• W2076385680 hasConceptScore W2076385680C192562407 @default.
• W2076385680 hasConceptScore W2076385680C200274948 @default.
• W2076385680 hasConceptScore W2076385680C204223013 @default.
• W2076385680 hasConceptScore W2076385680C204787440 @default.
• W2076385680 hasConceptScore W2076385680C2777046567 @default.
• W2076385680 hasConceptScore W2076385680C2779227376 @default.
• W2076385680 hasConceptScore W2076385680C2781089630 @default.
• W2076385680 hasConceptScore W2076385680C33923547 @default.
• W2076385680 hasConceptScore W2076385680C41794268 @default.
• W2076385680 hasConceptScore W2076385680C49040817 @default.
• W2076385680 hasConceptScore W2076385680C53524968 @default.
• W2076385680 hasConceptScore W2076385680C71924100 @default.
• W2076385680 hasConceptScore W2076385680C77066764 @default.
• W2076385680 hasIssue "6" @default.
• W2076385680 hasLocation W20763856801 @default.
• W2076385680 hasOpenAccess W2076385680 @default.
• W2076385680 hasPrimaryLocation W20763856801 @default.
• W2076385680 hasRelatedWork W1534103146 @default.
• W2076385680 hasRelatedWork W1844623463 @default.
• W2076385680 hasRelatedWork W1992832691 @default.
• W2076385680 hasRelatedWork W1996465108 @default.
• W2076385680 hasRelatedWork W2003241729 @default.
• W2076385680 hasRelatedWork W2076385680 @default.
• W2076385680 hasRelatedWork W2500364019 @default.
• W2076385680 hasRelatedWork W2791012773 @default.
• W2076385680 hasRelatedWork W573585812 @default.
• W2076385680 hasRelatedWork W2110224568 @default.
• W2076385680 hasVolume "30" @default.
• W2076385680 isParatext "false" @default.

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