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- W2076393900 abstract "Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature." @default.
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- W2076393900 date "2000-11-30" @default.
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- W2076393900 title "Raman and finite-element analysis of a mechanically strained silicon microstructure" @default.
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- W2076393900 doi "https://doi.org/10.1088/0960-1317/11/1/302" @default.
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