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- W2076448076 abstract "This work presents the via middle TSV integration at sub-28 nm nodes using a new local interconnect scheme involving V0 vias. Various V0 schemes are presented along with their respective resistance, capacitance and leakage current data. The characterization and reliability results are presented through TSV daisy chain structures and MOL via chains." @default.
- W2076448076 created "2016-06-24" @default.
- W2076448076 creator A5001865744 @default.
- W2076448076 creator A5010610879 @default.
- W2076448076 creator A5016961561 @default.
- W2076448076 creator A5025871170 @default.
- W2076448076 creator A5059894216 @default.
- W2076448076 creator A5070687795 @default.
- W2076448076 creator A5077428649 @default.
- W2076448076 date "2014-05-01" @default.
- W2076448076 modified "2023-10-14" @default.
- W2076448076 title "Challenges to via middle TSV integration at sub-28nm nodes" @default.
- W2076448076 cites W2056960558 @default.
- W2076448076 cites W2086481541 @default.
- W2076448076 cites W2092207361 @default.
- W2076448076 cites W2542798801 @default.
- W2076448076 doi "https://doi.org/10.1109/iitc.2014.6831869" @default.
- W2076448076 hasPublicationYear "2014" @default.
- W2076448076 type Work @default.
- W2076448076 sameAs 2076448076 @default.
- W2076448076 citedByCount "7" @default.
- W2076448076 countsByYear W20764480762015 @default.
- W2076448076 countsByYear W20764480762016 @default.
- W2076448076 countsByYear W20764480762017 @default.
- W2076448076 countsByYear W20764480762021 @default.
- W2076448076 crossrefType "proceedings-article" @default.
- W2076448076 hasAuthorship W2076448076A5001865744 @default.
- W2076448076 hasAuthorship W2076448076A5010610879 @default.
- W2076448076 hasAuthorship W2076448076A5016961561 @default.
- W2076448076 hasAuthorship W2076448076A5025871170 @default.
- W2076448076 hasAuthorship W2076448076A5059894216 @default.
- W2076448076 hasAuthorship W2076448076A5070687795 @default.
- W2076448076 hasAuthorship W2076448076A5077428649 @default.
- W2076448076 hasConcept C119599485 @default.
- W2076448076 hasConcept C121332964 @default.
- W2076448076 hasConcept C123745756 @default.
- W2076448076 hasConcept C127413603 @default.
- W2076448076 hasConcept C139719470 @default.
- W2076448076 hasConcept C162324750 @default.
- W2076448076 hasConcept C163258240 @default.
- W2076448076 hasConcept C17525397 @default.
- W2076448076 hasConcept C192562407 @default.
- W2076448076 hasConcept C24326235 @default.
- W2076448076 hasConcept C2777042071 @default.
- W2076448076 hasConcept C30066665 @default.
- W2076448076 hasConcept C31258907 @default.
- W2076448076 hasConcept C41008148 @default.
- W2076448076 hasConcept C43214815 @default.
- W2076448076 hasConcept C49040817 @default.
- W2076448076 hasConcept C530198007 @default.
- W2076448076 hasConcept C59014099 @default.
- W2076448076 hasConcept C59088047 @default.
- W2076448076 hasConcept C62520636 @default.
- W2076448076 hasConcept C9390403 @default.
- W2076448076 hasConceptScore W2076448076C119599485 @default.
- W2076448076 hasConceptScore W2076448076C121332964 @default.
- W2076448076 hasConceptScore W2076448076C123745756 @default.
- W2076448076 hasConceptScore W2076448076C127413603 @default.
- W2076448076 hasConceptScore W2076448076C139719470 @default.
- W2076448076 hasConceptScore W2076448076C162324750 @default.
- W2076448076 hasConceptScore W2076448076C163258240 @default.
- W2076448076 hasConceptScore W2076448076C17525397 @default.
- W2076448076 hasConceptScore W2076448076C192562407 @default.
- W2076448076 hasConceptScore W2076448076C24326235 @default.
- W2076448076 hasConceptScore W2076448076C2777042071 @default.
- W2076448076 hasConceptScore W2076448076C30066665 @default.
- W2076448076 hasConceptScore W2076448076C31258907 @default.
- W2076448076 hasConceptScore W2076448076C41008148 @default.
- W2076448076 hasConceptScore W2076448076C43214815 @default.
- W2076448076 hasConceptScore W2076448076C49040817 @default.
- W2076448076 hasConceptScore W2076448076C530198007 @default.
- W2076448076 hasConceptScore W2076448076C59014099 @default.
- W2076448076 hasConceptScore W2076448076C59088047 @default.
- W2076448076 hasConceptScore W2076448076C62520636 @default.
- W2076448076 hasConceptScore W2076448076C9390403 @default.
- W2076448076 hasLocation W20764480761 @default.
- W2076448076 hasOpenAccess W2076448076 @default.
- W2076448076 hasPrimaryLocation W20764480761 @default.
- W2076448076 hasRelatedWork W1990064822 @default.
- W2076448076 hasRelatedWork W2025923707 @default.
- W2076448076 hasRelatedWork W2030975897 @default.
- W2076448076 hasRelatedWork W2076448076 @default.
- W2076448076 hasRelatedWork W2125788370 @default.
- W2076448076 hasRelatedWork W2134342517 @default.
- W2076448076 hasRelatedWork W2137441628 @default.
- W2076448076 hasRelatedWork W2165217234 @default.
- W2076448076 hasRelatedWork W2811130421 @default.
- W2076448076 hasRelatedWork W2899084033 @default.
- W2076448076 isParatext "false" @default.
- W2076448076 isRetracted "false" @default.
- W2076448076 magId "2076448076" @default.
- W2076448076 workType "article" @default.