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- W2076508304 abstract "Microwave N2O plasma oxidation of strained Si1−xGex layers at low temperature (<200 °C) is reported. The hole confinement in accumulation in a metal oxide semiconductor (MOS)-gated SiGe/Si heterostructure has been confirmed by both simulation and experiments. Electrical properties are also discussed." @default.
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- W2076508304 date "1996-02-26" @default.
- W2076508304 modified "2023-10-17" @default.
- W2076508304 title "Ultrathin oxides using N2O on strained Si1−xGex layers" @default.
- W2076508304 doi "https://doi.org/10.1063/1.115946" @default.
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