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- W2076571866 abstract "Measurements of angle resolved velocity distributions of sputtered atoms by the laser Doppler shift method are reported. The influence of the emission angle (as well as the angle of incidence) on the velocity distribution is studied by directing the laser beam along selected emission angles and scanning the laser wavelength over the Doppler broadened resonance. The new version of our sputtering apparatus allows us to study nine different ejection angles. We report on first measurements with aluminum and titanium atoms." @default.
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- W2076571866 date "1997-02-01" @default.
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- W2076571866 title "Angle resolved velocity distributions of sputtered medium Z atoms" @default.
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- W2076571866 doi "https://doi.org/10.1016/s0022-3115(97)80213-9" @default.
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