Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076644263> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2076644263 endingPage "898" @default.
- W2076644263 startingPage "896" @default.
- W2076644263 abstract "High-dose O+ implantation of Si between 450 and 500 keV is investigated to better understand the mechanisms responsible for ion-induced growth of damage, especially in the top Si layer ahead of the region where a buried oxide forms. Two distinct states are identified in this Si layer over an extended range of fluence (≥1018 cm−2): a low-density defect state and a high-density one. These states are observed at all irradiation temperatures, including ambient temperature. The transition between the states is rather abrupt with the onset at a high fluence, which decreases with decreasing temperature. The existence of the low-density state offers a possibility of forming dislocation-free silicon-on-insulator wafers, even for ambient temperature irradiations. A processing method for achieving such wafers is discussed." @default.
- W2076644263 created "2016-06-24" @default.
- W2076644263 creator A5051661420 @default.
- W2076644263 creator A5053481463 @default.
- W2076644263 creator A5073105839 @default.
- W2076644263 date "1993-08-16" @default.
- W2076644263 modified "2023-10-14" @default.
- W2076644263 title "Damage accumulation during high-dose, O+ implantation in Si" @default.
- W2076644263 cites W2003617228 @default.
- W2076644263 cites W2027927893 @default.
- W2076644263 cites W2030128148 @default.
- W2076644263 cites W2033294021 @default.
- W2076644263 cites W2038567019 @default.
- W2076644263 cites W2041473401 @default.
- W2076644263 cites W2071914377 @default.
- W2076644263 cites W2131275155 @default.
- W2076644263 cites W2144759212 @default.
- W2076644263 doi "https://doi.org/10.1063/1.109894" @default.
- W2076644263 hasPublicationYear "1993" @default.
- W2076644263 type Work @default.
- W2076644263 sameAs 2076644263 @default.
- W2076644263 citedByCount "18" @default.
- W2076644263 crossrefType "journal-article" @default.
- W2076644263 hasAuthorship W2076644263A5051661420 @default.
- W2076644263 hasAuthorship W2076644263A5053481463 @default.
- W2076644263 hasAuthorship W2076644263A5073105839 @default.
- W2076644263 hasConcept C111337013 @default.
- W2076644263 hasConcept C121332964 @default.
- W2076644263 hasConcept C145148216 @default.
- W2076644263 hasConcept C153428861 @default.
- W2076644263 hasConcept C159122135 @default.
- W2076644263 hasConcept C159985019 @default.
- W2076644263 hasConcept C160671074 @default.
- W2076644263 hasConcept C171250308 @default.
- W2076644263 hasConcept C178790620 @default.
- W2076644263 hasConcept C185544564 @default.
- W2076644263 hasConcept C185592680 @default.
- W2076644263 hasConcept C191897082 @default.
- W2076644263 hasConcept C192562407 @default.
- W2076644263 hasConcept C22078206 @default.
- W2076644263 hasConcept C26873012 @default.
- W2076644263 hasConcept C2779227376 @default.
- W2076644263 hasConcept C2779851234 @default.
- W2076644263 hasConcept C39353612 @default.
- W2076644263 hasConcept C41823505 @default.
- W2076644263 hasConcept C49040817 @default.
- W2076644263 hasConcept C544956773 @default.
- W2076644263 hasConcept C97355855 @default.
- W2076644263 hasConceptScore W2076644263C111337013 @default.
- W2076644263 hasConceptScore W2076644263C121332964 @default.
- W2076644263 hasConceptScore W2076644263C145148216 @default.
- W2076644263 hasConceptScore W2076644263C153428861 @default.
- W2076644263 hasConceptScore W2076644263C159122135 @default.
- W2076644263 hasConceptScore W2076644263C159985019 @default.
- W2076644263 hasConceptScore W2076644263C160671074 @default.
- W2076644263 hasConceptScore W2076644263C171250308 @default.
- W2076644263 hasConceptScore W2076644263C178790620 @default.
- W2076644263 hasConceptScore W2076644263C185544564 @default.
- W2076644263 hasConceptScore W2076644263C185592680 @default.
- W2076644263 hasConceptScore W2076644263C191897082 @default.
- W2076644263 hasConceptScore W2076644263C192562407 @default.
- W2076644263 hasConceptScore W2076644263C22078206 @default.
- W2076644263 hasConceptScore W2076644263C26873012 @default.
- W2076644263 hasConceptScore W2076644263C2779227376 @default.
- W2076644263 hasConceptScore W2076644263C2779851234 @default.
- W2076644263 hasConceptScore W2076644263C39353612 @default.
- W2076644263 hasConceptScore W2076644263C41823505 @default.
- W2076644263 hasConceptScore W2076644263C49040817 @default.
- W2076644263 hasConceptScore W2076644263C544956773 @default.
- W2076644263 hasConceptScore W2076644263C97355855 @default.
- W2076644263 hasIssue "7" @default.
- W2076644263 hasLocation W20766442631 @default.
- W2076644263 hasOpenAccess W2076644263 @default.
- W2076644263 hasPrimaryLocation W20766442631 @default.
- W2076644263 hasRelatedWork W1617912146 @default.
- W2076644263 hasRelatedWork W2027105637 @default.
- W2076644263 hasRelatedWork W2028862633 @default.
- W2076644263 hasRelatedWork W2047157574 @default.
- W2076644263 hasRelatedWork W2076021990 @default.
- W2076644263 hasRelatedWork W2084616009 @default.
- W2076644263 hasRelatedWork W2094423372 @default.
- W2076644263 hasRelatedWork W2472220583 @default.
- W2076644263 hasRelatedWork W4324268172 @default.
- W2076644263 hasRelatedWork W2030262217 @default.
- W2076644263 hasVolume "63" @default.
- W2076644263 isParatext "false" @default.
- W2076644263 isRetracted "false" @default.
- W2076644263 magId "2076644263" @default.
- W2076644263 workType "article" @default.