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- W2076665114 abstract "Hydrogenated amorphous silicon-carbon (a-SiC) films were fabricated using a novel plasma CVD method, called the CPM (Controlled Plasma Magnetron) method. The films obtained had a large Si-C bond density and a low Si-H bond density. The absorption coefficient at the photon energy level of 2.5 to 3.5 eV for these films was one order of magnitude lower than that for conventional a-SiC films. Furthermore, the dark conductivity of boron-doped films increased to more than 10 -4 (Ω·cm) -1 , which is the highest value achieved for a-SiC with a carbon content of 55%." @default.
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- W2076665114 date "1991-01-01" @default.
- W2076665114 modified "2023-10-18" @default.
- W2076665114 title "Amorphous Silicon-Carbon Alloy Prepared by the CMP (Controlled Plasma Magnetron) Method" @default.
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- W2076665114 doi "https://doi.org/10.1143/jjap.30.7" @default.
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