Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076751208> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2076751208 abstract "Via fill and intervia coverage of AR5 and AR7 anti-reflectants were measured for 608nm deep vias in thermal oxide. Fitting functions were found which gave god agreement with experimental data. The most important factors were AR thickness, via duty ratio and via width. The importance of these factors was different for via fill and intervia coverage, and for AR5 and AR7. AR7 was found to fill a range of vias to a depth of 25 percent to 50 percent, suitable for a partial planarization approach to dual damascene fabrication. Planarization was shown to be relatively insensitive to several coat process variations, but sensitive to solution surface tension." @default.
- W2076751208 created "2016-06-24" @default.
- W2076751208 creator A5029305802 @default.
- W2076751208 creator A5034662729 @default.
- W2076751208 creator A5037625800 @default.
- W2076751208 creator A5087544745 @default.
- W2076751208 date "2000-08-18" @default.
- W2076751208 modified "2023-09-23" @default.
- W2076751208 title "Planarization approaches to via-first dual-damascene processing" @default.
- W2076751208 doi "https://doi.org/10.1117/12.395723" @default.
- W2076751208 hasPublicationYear "2000" @default.
- W2076751208 type Work @default.
- W2076751208 sameAs 2076751208 @default.
- W2076751208 citedByCount "1" @default.
- W2076751208 crossrefType "proceedings-article" @default.
- W2076751208 hasAuthorship W2076751208A5029305802 @default.
- W2076751208 hasAuthorship W2076751208A5034662729 @default.
- W2076751208 hasAuthorship W2076751208A5037625800 @default.
- W2076751208 hasAuthorship W2076751208A5087544745 @default.
- W2076751208 hasConcept C116372231 @default.
- W2076751208 hasConcept C121332964 @default.
- W2076751208 hasConcept C127413603 @default.
- W2076751208 hasConcept C133386390 @default.
- W2076751208 hasConcept C136525101 @default.
- W2076751208 hasConcept C138113353 @default.
- W2076751208 hasConcept C142724271 @default.
- W2076751208 hasConcept C153294291 @default.
- W2076751208 hasConcept C159985019 @default.
- W2076751208 hasConcept C180088628 @default.
- W2076751208 hasConcept C192562407 @default.
- W2076751208 hasConcept C204530211 @default.
- W2076751208 hasConcept C204787440 @default.
- W2076751208 hasConcept C24326235 @default.
- W2076751208 hasConcept C49040817 @default.
- W2076751208 hasConcept C62520636 @default.
- W2076751208 hasConcept C71924100 @default.
- W2076751208 hasConcept C8892853 @default.
- W2076751208 hasConceptScore W2076751208C116372231 @default.
- W2076751208 hasConceptScore W2076751208C121332964 @default.
- W2076751208 hasConceptScore W2076751208C127413603 @default.
- W2076751208 hasConceptScore W2076751208C133386390 @default.
- W2076751208 hasConceptScore W2076751208C136525101 @default.
- W2076751208 hasConceptScore W2076751208C138113353 @default.
- W2076751208 hasConceptScore W2076751208C142724271 @default.
- W2076751208 hasConceptScore W2076751208C153294291 @default.
- W2076751208 hasConceptScore W2076751208C159985019 @default.
- W2076751208 hasConceptScore W2076751208C180088628 @default.
- W2076751208 hasConceptScore W2076751208C192562407 @default.
- W2076751208 hasConceptScore W2076751208C204530211 @default.
- W2076751208 hasConceptScore W2076751208C204787440 @default.
- W2076751208 hasConceptScore W2076751208C24326235 @default.
- W2076751208 hasConceptScore W2076751208C49040817 @default.
- W2076751208 hasConceptScore W2076751208C62520636 @default.
- W2076751208 hasConceptScore W2076751208C71924100 @default.
- W2076751208 hasConceptScore W2076751208C8892853 @default.
- W2076751208 hasLocation W20767512081 @default.
- W2076751208 hasOpenAccess W2076751208 @default.
- W2076751208 hasPrimaryLocation W20767512081 @default.
- W2076751208 hasRelatedWork W1959320695 @default.
- W2076751208 hasRelatedWork W1982456345 @default.
- W2076751208 hasRelatedWork W1984346822 @default.
- W2076751208 hasRelatedWork W2060841971 @default.
- W2076751208 hasRelatedWork W2069310538 @default.
- W2076751208 hasRelatedWork W2078200846 @default.
- W2076751208 hasRelatedWork W2142361012 @default.
- W2076751208 hasRelatedWork W2151397888 @default.
- W2076751208 hasRelatedWork W2546194799 @default.
- W2076751208 hasRelatedWork W4250571325 @default.
- W2076751208 isParatext "false" @default.
- W2076751208 isRetracted "false" @default.
- W2076751208 magId "2076751208" @default.
- W2076751208 workType "article" @default.