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- W2076755035 abstract "The deep levels ON 1 and ON 2a/b introduced by oxidation into 4H-SiC are characterized via standard DLTS and via filling pulse dependent DLTS measurements. Separation of the closely spaced ON 2a/b defect is achieved by using a higher resolution correlation function (Gaver-Stehfest 4) and apparent energy level, apparent electron capture cross section and filling pulse measurement derived capture cross sections are given." @default.
- W2076755035 created "2016-06-24" @default.
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- W2076755035 date "2014-02-01" @default.
- W2076755035 modified "2023-09-27" @default.
- W2076755035 title "Oxidation Induced ON<sub>1</sub>, ON<sub>2a/b</sub> Defects in 4H-SiC Characterized by DLTS" @default.
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- W2076755035 doi "https://doi.org/10.4028/www.scientific.net/msf.778-780.281" @default.
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