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- W2076758759 abstract "LithoGraph<SUP>TM</SUP>, a PC-based lithography simulation software package developed by Etec Systems, is examined for its ability to be a useful tool in lithography process development. We evaluated conventional binary masks, attenuated phase shift masks (PSMs), alternate PSMs, and quadrupole illumination techniques at varying stepper parameters. As boundary conditions for the optimization, we considered image contrast, exposure-defocus latitude, exposure dose level, and optical proximity corrections. To quantify the extent of optical proximity effects, we calculated the overall exposure latitude by overlapping exposure-defocus diagrams generated at various pattern pitches." @default.
- W2076758759 created "2016-06-24" @default.
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- W2076758759 date "1994-02-15" @default.
- W2076758759 modified "2023-10-16" @default.
- W2076758759 title "<title>Practical approach to 0.35-um i-line lithography</title>" @default.
- W2076758759 doi "https://doi.org/10.1117/12.167283" @default.
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