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- W2076851288 abstract "The influence of mechanical stress in a multilayer structure on spatial distribution of dopants in implanted-junction and diffusion-junction rectifiers, which was produced in the structure has been analyzed. It is shown that the stress leads to additional reduction of spatial dimensions of the p–n junction in comparison with the reduction — a result of inhomogeneity — of the diffusion coefficient of dopant and other parameters of dopant redistribution (see, for example, Refs. 1–3)." @default.
- W2076851288 created "2016-06-24" @default.
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- W2076851288 date "2010-04-10" @default.
- W2076851288 modified "2023-09-26" @default.
- W2076851288 title "INFLUENCE OF MECHANICAL STRESS IN A MULTILAYER STRUCTURE ON SPATIAL DISTRIBUTION OF DOPANTS IN IMPLANTED-JUNCTION AND DIFFUSION-JUNCTION RECTIFIERS" @default.
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- W2076851288 doi "https://doi.org/10.1142/s0217984910022925" @default.
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