FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076853573> ?p ?o ?g. }

• W2076853573 endingPage "3023" @default.
• W2076853573 startingPage "3015" @default.
• W2076853573 abstract "We report on measurements of positive ion energies, current densities, and angular distributions at the grounded electrode of inductively coupled discharges in mixtures of argon and chlorine. We also report on ion species and Langmuir probe measurements for these discharges. The inductive drive in our gaseous electronics conference reference cell produced high plasma densities (1011–1012/cm3) and stable plasma potentials. As a result, ion energy distributions consisted of a single peak well separated from zero energy. At pressures of 2.5–20 mTorr and constant rf power, the addition of Cl2 to an Ar discharge lowered ion current densities, reduced ion energies, and reduced the width of the ion energy distributions. Half-widths of the ion angular distributions ranged from 4.5° to 8.5° with the distributions broadening with increases in pressure or rf power. The addition of Cl2 to Ar discharges made the angular distributions less sensitive to total pressure. Cl+ replaced Ar+ as the dominant ionized species when small amounts of chlorine were added to Ar discharges." @default.
• W2076853573 created "2016-06-24" @default.
• W2076853573 creator A5068178163 @default.
• W2076853573 creator A5073491496 @default.
• W2076853573 creator A5079024476 @default.
• W2076853573 creator A5085329927 @default.
• W2076853573 creator A5090573496 @default.
• W2076853573 date "1997-11-01" @default.
• W2076853573 modified "2023-09-26" @default.
• W2076853573 title "Ion distribution functions in inductively coupled radio frequency discharges in argon–chlorine mixtures" @default.
• W2076853573 cites W1965451903 @default.
• W2076853573 cites W1968428741 @default.
• W2076853573 cites W1975161971 @default.
• W2076853573 cites W1976268918 @default.
• W2076853573 cites W1978883589 @default.
• W2076853573 cites W1979681512 @default.
• W2076853573 cites W1987980691 @default.
• W2076853573 cites W1990939766 @default.
• W2076853573 cites W1998927883 @default.
• W2076853573 cites W2009224111 @default.
• W2076853573 cites W2011064812 @default.
• W2076853573 cites W2016813840 @default.
• W2076853573 cites W2028679502 @default.
• W2076853573 cites W2032314191 @default.
• W2076853573 cites W2036692886 @default.
• W2076853573 cites W2036911523 @default.
• W2076853573 cites W2037644423 @default.
• W2076853573 cites W2042071870 @default.
• W2076853573 cites W2044931314 @default.
• W2076853573 cites W2045595872 @default.
• W2076853573 cites W2050852191 @default.
• W2076853573 cites W2066737180 @default.
• W2076853573 cites W2067013455 @default.
• W2076853573 cites W2067566148 @default.
• W2076853573 cites W2068847633 @default.
• W2076853573 cites W2073049328 @default.
• W2076853573 cites W2077202758 @default.
• W2076853573 cites W2085401500 @default.
• W2076853573 cites W2086515046 @default.
• W2076853573 cites W2092174669 @default.
• W2076853573 cites W2094458959 @default.
• W2076853573 cites W2116141793 @default.
• W2076853573 cites W2124556852 @default.
• W2076853573 cites W2146474896 @default.
• W2076853573 doi "https://doi.org/10.1116/1.580898" @default.
• W2076853573 hasPublicationYear "1997" @default.
• W2076853573 type Work @default.
• W2076853573 sameAs 2076853573 @default.
• W2076853573 citedByCount "38" @default.
• W2076853573 countsByYear W20768535732012 @default.
• W2076853573 countsByYear W20768535732013 @default.
• W2076853573 countsByYear W20768535732015 @default.
• W2076853573 countsByYear W20768535732016 @default.
• W2076853573 crossrefType "journal-article" @default.
• W2076853573 hasAuthorship W2076853573A5068178163 @default.
• W2076853573 hasAuthorship W2076853573A5073491496 @default.
• W2076853573 hasAuthorship W2076853573A5079024476 @default.
• W2076853573 hasAuthorship W2076853573A5085329927 @default.
• W2076853573 hasAuthorship W2076853573A5090573496 @default.
• W2076853573 hasConcept C113196181 @default.
• W2076853573 hasConcept C121332964 @default.
• W2076853573 hasConcept C145148216 @default.
• W2076853573 hasConcept C176118016 @default.
• W2076853573 hasConcept C178790620 @default.
• W2076853573 hasConcept C184779094 @default.
• W2076853573 hasConcept C185592680 @default.
• W2076853573 hasConcept C198291218 @default.
• W2076853573 hasConcept C2778220808 @default.
• W2076853573 hasConcept C43503373 @default.
• W2076853573 hasConcept C43617362 @default.
• W2076853573 hasConcept C505241676 @default.
• W2076853573 hasConcept C547737533 @default.
• W2076853573 hasConcept C62520636 @default.
• W2076853573 hasConcept C82706917 @default.
• W2076853573 hasConcept C95974651 @default.
• W2076853573 hasConceptScore W2076853573C113196181 @default.
• W2076853573 hasConceptScore W2076853573C121332964 @default.
• W2076853573 hasConceptScore W2076853573C145148216 @default.
• W2076853573 hasConceptScore W2076853573C176118016 @default.
• W2076853573 hasConceptScore W2076853573C178790620 @default.
• W2076853573 hasConceptScore W2076853573C184779094 @default.
• W2076853573 hasConceptScore W2076853573C185592680 @default.
• W2076853573 hasConceptScore W2076853573C198291218 @default.
• W2076853573 hasConceptScore W2076853573C2778220808 @default.
• W2076853573 hasConceptScore W2076853573C43503373 @default.
• W2076853573 hasConceptScore W2076853573C43617362 @default.
• W2076853573 hasConceptScore W2076853573C505241676 @default.
• W2076853573 hasConceptScore W2076853573C547737533 @default.
• W2076853573 hasConceptScore W2076853573C62520636 @default.
• W2076853573 hasConceptScore W2076853573C82706917 @default.
• W2076853573 hasConceptScore W2076853573C95974651 @default.
• W2076853573 hasIssue "6" @default.
• W2076853573 hasLocation W20768535731 @default.
• W2076853573 hasOpenAccess W2076853573 @default.
• W2076853573 hasPrimaryLocation W20768535731 @default.
• W2076853573 hasRelatedWork W1601588525 @default.
• W2076853573 hasRelatedWork W1619276345 @default.
• W2076853573 hasRelatedWork W1820393622 @default.

• next