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- W2076865259 abstract "This paper introduces the preparation method of large scale free P+ diaphragm based on the boron doped and anisotropic wet etching techniques. It also explores the impact of the RF power configuration, pressure and SF6 flow rate on etching rate during ICP etching. It is indicated that silicon can be used as mask to solve the problems of large scale film break and the adhesion between mask and film which are caused by vacuumization during ICP etching. In order to avoid over etching, twice etching technique can be employed to control etching time and end point. Results of the experiment show that through etching, free P+ diaphragm can be fabricated into sensitive free beam which can be widely used in MEMS." @default.
- W2076865259 created "2016-06-24" @default.
- W2076865259 creator A5019891895 @default.
- W2076865259 date "2012-02-01" @default.
- W2076865259 modified "2023-09-27" @default.
- W2076865259 title "Research on Preparation Method and Etching Technique of Large Scale Free P+ Diaphragm" @default.
- W2076865259 cites W2006634883 @default.
- W2076865259 cites W2146408065 @default.
- W2076865259 doi "https://doi.org/10.4028/www.scientific.net/amr.468-471.2699" @default.
- W2076865259 hasPublicationYear "2012" @default.
- W2076865259 type Work @default.
- W2076865259 sameAs 2076865259 @default.
- W2076865259 citedByCount "0" @default.
- W2076865259 crossrefType "journal-article" @default.
- W2076865259 hasAuthorship W2076865259A5019891895 @default.
- W2076865259 hasConcept C100460472 @default.
- W2076865259 hasConcept C107187091 @default.
- W2076865259 hasConcept C119599485 @default.
- W2076865259 hasConcept C127413603 @default.
- W2076865259 hasConcept C1291036 @default.
- W2076865259 hasConcept C130472188 @default.
- W2076865259 hasConcept C157138929 @default.
- W2076865259 hasConcept C159985019 @default.
- W2076865259 hasConcept C164292776 @default.
- W2076865259 hasConcept C171250308 @default.
- W2076865259 hasConcept C192562407 @default.
- W2076865259 hasConcept C2779227376 @default.
- W2076865259 hasConcept C37977207 @default.
- W2076865259 hasConcept C49040817 @default.
- W2076865259 hasConceptScore W2076865259C100460472 @default.
- W2076865259 hasConceptScore W2076865259C107187091 @default.
- W2076865259 hasConceptScore W2076865259C119599485 @default.
- W2076865259 hasConceptScore W2076865259C127413603 @default.
- W2076865259 hasConceptScore W2076865259C1291036 @default.
- W2076865259 hasConceptScore W2076865259C130472188 @default.
- W2076865259 hasConceptScore W2076865259C157138929 @default.
- W2076865259 hasConceptScore W2076865259C159985019 @default.
- W2076865259 hasConceptScore W2076865259C164292776 @default.
- W2076865259 hasConceptScore W2076865259C171250308 @default.
- W2076865259 hasConceptScore W2076865259C192562407 @default.
- W2076865259 hasConceptScore W2076865259C2779227376 @default.
- W2076865259 hasConceptScore W2076865259C37977207 @default.
- W2076865259 hasConceptScore W2076865259C49040817 @default.
- W2076865259 hasLocation W20768652591 @default.
- W2076865259 hasOpenAccess W2076865259 @default.
- W2076865259 hasPrimaryLocation W20768652591 @default.
- W2076865259 hasRelatedWork W2035159056 @default.
- W2076865259 hasRelatedWork W2164353131 @default.
- W2076865259 hasRelatedWork W2260091162 @default.
- W2076865259 hasRelatedWork W2351751546 @default.
- W2076865259 hasRelatedWork W2379088195 @default.
- W2076865259 hasRelatedWork W3089526026 @default.
- W2076865259 hasRelatedWork W2832688531 @default.
- W2076865259 hasRelatedWork W2833284216 @default.
- W2076865259 hasRelatedWork W2855826086 @default.
- W2076865259 hasRelatedWork W2863280949 @default.
- W2076865259 hasRelatedWork W2866223446 @default.
- W2076865259 hasRelatedWork W2881499809 @default.
- W2076865259 hasRelatedWork W2932080596 @default.
- W2076865259 hasRelatedWork W3139075591 @default.
- W2076865259 hasRelatedWork W3141611939 @default.
- W2076865259 hasRelatedWork W3142146836 @default.
- W2076865259 hasRelatedWork W3149016162 @default.
- W2076865259 hasRelatedWork W3151352311 @default.
- W2076865259 hasRelatedWork W3152263741 @default.
- W2076865259 hasRelatedWork W3194778335 @default.
- W2076865259 isParatext "false" @default.
- W2076865259 isRetracted "false" @default.
- W2076865259 magId "2076865259" @default.
- W2076865259 workType "article" @default.