Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076953504> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2076953504 endingPage "1130" @default.
- W2076953504 startingPage "1124" @default.
- W2076953504 abstract "White light vertical scanning interferometry (VSI) has been well developed during the past two decades and it is well suited for optical component evaluation due to its non-contact nature. However, because of its inherent limits in the field of view, the VSI is incapable of performing large range measurements. For large surfaces, stitching must be employed. In this paper, a nanomeasuring machine (NMM) based white light tilt scanning interferometer (TSI) is described, which can evaluate an optical array component in one round, without the need for stitching. By integrating a NMM, the tilt angle in the TSI no longer will require to be calibrated, easing in this way the realization of the TSI. With a tilt stage mounted on the NMM, the proposed system has two angles related to the measurement, which can provide excellent “fringes slipping out” correction ability. The analysis and the experiments are given." @default.
- W2076953504 created "2016-06-24" @default.
- W2076953504 creator A5031729638 @default.
- W2076953504 creator A5035268567 @default.
- W2076953504 creator A5038926977 @default.
- W2076953504 creator A5060012186 @default.
- W2076953504 creator A5077467341 @default.
- W2076953504 creator A5080301162 @default.
- W2076953504 date "2011-09-01" @default.
- W2076953504 modified "2023-09-26" @default.
- W2076953504 title "A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement" @default.
- W2076953504 cites W1965692680 @default.
- W2076953504 cites W1970952177 @default.
- W2076953504 cites W2009676293 @default.
- W2076953504 cites W2027280808 @default.
- W2076953504 cites W2045182240 @default.
- W2076953504 cites W2047669127 @default.
- W2076953504 cites W2047684313 @default.
- W2076953504 cites W2057658285 @default.
- W2076953504 cites W2062835939 @default.
- W2076953504 cites W2063105173 @default.
- W2076953504 cites W2066924799 @default.
- W2076953504 cites W2145023731 @default.
- W2076953504 cites W2148388784 @default.
- W2076953504 cites W2159908092 @default.
- W2076953504 doi "https://doi.org/10.1016/j.optlaseng.2011.05.011" @default.
- W2076953504 hasPublicationYear "2011" @default.
- W2076953504 type Work @default.
- W2076953504 sameAs 2076953504 @default.
- W2076953504 citedByCount "7" @default.
- W2076953504 countsByYear W20769535042012 @default.
- W2076953504 countsByYear W20769535042014 @default.
- W2076953504 countsByYear W20769535042015 @default.
- W2076953504 countsByYear W20769535042018 @default.
- W2076953504 countsByYear W20769535042019 @default.
- W2076953504 countsByYear W20769535042021 @default.
- W2076953504 crossrefType "journal-article" @default.
- W2076953504 hasAuthorship W2076953504A5031729638 @default.
- W2076953504 hasAuthorship W2076953504A5035268567 @default.
- W2076953504 hasAuthorship W2076953504A5038926977 @default.
- W2076953504 hasAuthorship W2076953504A5060012186 @default.
- W2076953504 hasAuthorship W2076953504A5077467341 @default.
- W2076953504 hasAuthorship W2076953504A5080301162 @default.
- W2076953504 hasConcept C105795698 @default.
- W2076953504 hasConcept C120665830 @default.
- W2076953504 hasConcept C121332964 @default.
- W2076953504 hasConcept C127413603 @default.
- W2076953504 hasConcept C159074562 @default.
- W2076953504 hasConcept C166689943 @default.
- W2076953504 hasConcept C2777045574 @default.
- W2076953504 hasConcept C2779844322 @default.
- W2076953504 hasConcept C2781089630 @default.
- W2076953504 hasConcept C29081049 @default.
- W2076953504 hasConcept C2984065012 @default.
- W2076953504 hasConcept C33923547 @default.
- W2076953504 hasConcept C41008148 @default.
- W2076953504 hasConcept C78519656 @default.
- W2076953504 hasConceptScore W2076953504C105795698 @default.
- W2076953504 hasConceptScore W2076953504C120665830 @default.
- W2076953504 hasConceptScore W2076953504C121332964 @default.
- W2076953504 hasConceptScore W2076953504C127413603 @default.
- W2076953504 hasConceptScore W2076953504C159074562 @default.
- W2076953504 hasConceptScore W2076953504C166689943 @default.
- W2076953504 hasConceptScore W2076953504C2777045574 @default.
- W2076953504 hasConceptScore W2076953504C2779844322 @default.
- W2076953504 hasConceptScore W2076953504C2781089630 @default.
- W2076953504 hasConceptScore W2076953504C29081049 @default.
- W2076953504 hasConceptScore W2076953504C2984065012 @default.
- W2076953504 hasConceptScore W2076953504C33923547 @default.
- W2076953504 hasConceptScore W2076953504C41008148 @default.
- W2076953504 hasConceptScore W2076953504C78519656 @default.
- W2076953504 hasIssue "9-10" @default.
- W2076953504 hasLocation W20769535041 @default.
- W2076953504 hasOpenAccess W2076953504 @default.
- W2076953504 hasPrimaryLocation W20769535041 @default.
- W2076953504 hasRelatedWork W1991029768 @default.
- W2076953504 hasRelatedWork W1993433469 @default.
- W2076953504 hasRelatedWork W2052949867 @default.
- W2076953504 hasRelatedWork W2063105173 @default.
- W2076953504 hasRelatedWork W2066321361 @default.
- W2076953504 hasRelatedWork W2076953504 @default.
- W2076953504 hasRelatedWork W2108024223 @default.
- W2076953504 hasRelatedWork W2124655201 @default.
- W2076953504 hasRelatedWork W2606552166 @default.
- W2076953504 hasRelatedWork W2889465156 @default.
- W2076953504 hasVolume "49" @default.
- W2076953504 isParatext "false" @default.
- W2076953504 isRetracted "false" @default.
- W2076953504 magId "2076953504" @default.
- W2076953504 workType "article" @default.