Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076997488> ?p ?o ?g. }
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- W2076997488 endingPage "L622" @default.
- W2076997488 startingPage "L620" @default.
- W2076997488 abstract "We report continuous wave (CW) IR semiconductor laser annealing for the activation of boron atoms implanted into an n-type Si wafer with diamond-like carbon (DLC) films as optical absorption layers. Boron atoms were implanted at 10 keV at doses of 5?1014, 1?1015, and 1.5?1015 cm-2. The depth at the boron concentration of 1018 cm-2 was 50 nm. Samples were annealed by irradiation at 66.5?80.5 kW/cm2 and 2.6 ms. The sheet resistance of the sample markedly decreased to 531 ?/sq for implantation at 1.5?1015 cm-2 by laser annealing. Boron atoms were almost completely activated at a carrier density near the boron concentration for implantation at 10 keV. The largest diffusion length of boron atoms was 3 nm." @default.
- W2076997488 created "2016-06-24" @default.
- W2076997488 creator A5004287897 @default.
- W2076997488 creator A5031622144 @default.
- W2076997488 creator A5034494568 @default.
- W2076997488 creator A5042291132 @default.
- W2076997488 creator A5049992179 @default.
- W2076997488 date "2007-06-22" @default.
- W2076997488 modified "2023-09-25" @default.
- W2076997488 title "Activation of Implanted Boron Atoms in Silicon Wafers by Infrared Semiconductor Laser Annealing Using Carbon Films as Optical Absorption Layers" @default.
- W2076997488 cites W2005079553 @default.
- W2076997488 cites W2023034470 @default.
- W2076997488 cites W2024706078 @default.
- W2076997488 cites W2038372086 @default.
- W2076997488 cites W2070866217 @default.
- W2076997488 cites W2109947041 @default.
- W2076997488 doi "https://doi.org/10.1143/jjap.46.l620" @default.
- W2076997488 hasPublicationYear "2007" @default.
- W2076997488 type Work @default.
- W2076997488 sameAs 2076997488 @default.
- W2076997488 citedByCount "3" @default.
- W2076997488 crossrefType "journal-article" @default.
- W2076997488 hasAuthorship W2076997488A5004287897 @default.
- W2076997488 hasAuthorship W2076997488A5031622144 @default.
- W2076997488 hasAuthorship W2076997488A5034494568 @default.
- W2076997488 hasAuthorship W2076997488A5042291132 @default.
- W2076997488 hasAuthorship W2076997488A5049992179 @default.
- W2076997488 hasConcept C104779481 @default.
- W2076997488 hasConcept C108225325 @default.
- W2076997488 hasConcept C113196181 @default.
- W2076997488 hasConcept C120665830 @default.
- W2076997488 hasConcept C121332964 @default.
- W2076997488 hasConcept C125287762 @default.
- W2076997488 hasConcept C140205800 @default.
- W2076997488 hasConcept C153642686 @default.
- W2076997488 hasConcept C158355884 @default.
- W2076997488 hasConcept C159985019 @default.
- W2076997488 hasConcept C160671074 @default.
- W2076997488 hasConcept C178790620 @default.
- W2076997488 hasConcept C185592680 @default.
- W2076997488 hasConcept C191897082 @default.
- W2076997488 hasConcept C192562407 @default.
- W2076997488 hasConcept C2777855556 @default.
- W2076997488 hasConcept C43617362 @default.
- W2076997488 hasConcept C49040817 @default.
- W2076997488 hasConcept C501308230 @default.
- W2076997488 hasConcept C520434653 @default.
- W2076997488 hasConcept C544956773 @default.
- W2076997488 hasConceptScore W2076997488C104779481 @default.
- W2076997488 hasConceptScore W2076997488C108225325 @default.
- W2076997488 hasConceptScore W2076997488C113196181 @default.
- W2076997488 hasConceptScore W2076997488C120665830 @default.
- W2076997488 hasConceptScore W2076997488C121332964 @default.
- W2076997488 hasConceptScore W2076997488C125287762 @default.
- W2076997488 hasConceptScore W2076997488C140205800 @default.
- W2076997488 hasConceptScore W2076997488C153642686 @default.
- W2076997488 hasConceptScore W2076997488C158355884 @default.
- W2076997488 hasConceptScore W2076997488C159985019 @default.
- W2076997488 hasConceptScore W2076997488C160671074 @default.
- W2076997488 hasConceptScore W2076997488C178790620 @default.
- W2076997488 hasConceptScore W2076997488C185592680 @default.
- W2076997488 hasConceptScore W2076997488C191897082 @default.
- W2076997488 hasConceptScore W2076997488C192562407 @default.
- W2076997488 hasConceptScore W2076997488C2777855556 @default.
- W2076997488 hasConceptScore W2076997488C43617362 @default.
- W2076997488 hasConceptScore W2076997488C49040817 @default.
- W2076997488 hasConceptScore W2076997488C501308230 @default.
- W2076997488 hasConceptScore W2076997488C520434653 @default.
- W2076997488 hasConceptScore W2076997488C544956773 @default.
- W2076997488 hasIssue "No. 25" @default.
- W2076997488 hasLocation W20769974881 @default.
- W2076997488 hasOpenAccess W2076997488 @default.
- W2076997488 hasPrimaryLocation W20769974881 @default.
- W2076997488 hasRelatedWork W1964478537 @default.
- W2076997488 hasRelatedWork W1976261375 @default.
- W2076997488 hasRelatedWork W1976707706 @default.
- W2076997488 hasRelatedWork W1983867229 @default.
- W2076997488 hasRelatedWork W1986783785 @default.
- W2076997488 hasRelatedWork W2065669148 @default.
- W2076997488 hasRelatedWork W2088081281 @default.
- W2076997488 hasRelatedWork W2275386326 @default.
- W2076997488 hasRelatedWork W2370419749 @default.
- W2076997488 hasRelatedWork W2467272804 @default.
- W2076997488 hasVolume "46" @default.
- W2076997488 isParatext "false" @default.
- W2076997488 isRetracted "false" @default.
- W2076997488 magId "2076997488" @default.
- W2076997488 workType "article" @default.