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• W2077044700 endingPage "636" @default.
• W2077044700 startingPage "625" @default.
• W2077044700 abstract "We report a new type of negative-tone photoresist in this paper. The resist is based on a composite of EPON resins 154 and 165 (both from Hexion Specialty Chemicals, Inc., Columbus, OH 43215). These two epoxy-based resins were mixed in an optimal ratio and dissolved in gamma-butyrolactone (GBL) solvent. The mixture was then photosensitized by adding a given amount of triaryl sulfonium salt to obtain a new negative-tone photoresist that can be used in for ultra-high-aspect-ratio microstructure fabrication with UV lithography. Preliminary studies have found that microstructures with heights of more than 1000 μm and feature sizes down to 10 μm (aspect-ratios of more than 100) can be obtained using the new resist film with ultraviolet lithography. The microstructures have excellent sidewall quality. In this paper, both the material properties and lithography properties of this new type of UV resist will be presented. The potential applications of the new resist in microfabrication and MEMS systems are also discussed." @default.
• W2077044700 created "2016-06-24" @default.
• W2077044700 creator A5027724374 @default.
• W2077044700 creator A5038208939 @default.
• W2077044700 creator A5089437929 @default.
• W2077044700 date "2007-04-01" @default.
• W2077044700 modified "2023-10-16" @default.
• W2077044700 title "A new UV lithography photoresist based on composite of EPON resins 165 and 154 for fabrication of high-aspect-ratio microstructures" @default.
• W2077044700 cites W1981056760 @default.
• W2077044700 cites W2004407899 @default.
• W2077044700 cites W2005044401 @default.
• W2077044700 cites W2009039852 @default.
• W2077044700 cites W2014317570 @default.
• W2077044700 cites W2021628451 @default.
• W2077044700 cites W2028567428 @default.
• W2077044700 cites W2037543096 @default.
• W2077044700 cites W2038188840 @default.
• W2077044700 cites W2038259464 @default.
• W2077044700 cites W2039278466 @default.
• W2077044700 cites W2042232015 @default.
• W2077044700 cites W2048974962 @default.
• W2077044700 cites W2061548838 @default.
• W2077044700 cites W2064000554 @default.
• W2077044700 cites W2068947307 @default.
• W2077044700 cites W2075965845 @default.
• W2077044700 cites W2082983861 @default.
• W2077044700 cites W2089190438 @default.
• W2077044700 cites W2093764712 @default.
• W2077044700 cites W2117663380 @default.
• W2077044700 cites W2131774812 @default.
• W2077044700 cites W2134785604 @default.
• W2077044700 cites W2142303686 @default.
• W2077044700 cites W2152432112 @default.
• W2077044700 cites W2164379828 @default.
• W2077044700 doi "https://doi.org/10.1016/j.sna.2006.09.009" @default.
• W2077044700 hasPublicationYear "2007" @default.
• W2077044700 type Work @default.
• W2077044700 sameAs 2077044700 @default.
• W2077044700 citedByCount "33" @default.
• W2077044700 countsByYear W20770447002012 @default.
• W2077044700 countsByYear W20770447002013 @default.
• W2077044700 countsByYear W20770447002014 @default.
• W2077044700 countsByYear W20770447002015 @default.
• W2077044700 countsByYear W20770447002017 @default.
• W2077044700 countsByYear W20770447002018 @default.
• W2077044700 countsByYear W20770447002019 @default.
• W2077044700 countsByYear W20770447002020 @default.
• W2077044700 countsByYear W20770447002022 @default.
• W2077044700 countsByYear W20770447002023 @default.
• W2077044700 crossrefType "journal-article" @default.
• W2077044700 hasAuthorship W2077044700A5027724374 @default.
• W2077044700 hasAuthorship W2077044700A5038208939 @default.
• W2077044700 hasAuthorship W2077044700A5089437929 @default.
• W2077044700 hasBestOaLocation W20770447001 @default.
• W2077044700 hasConcept C104779481 @default.
• W2077044700 hasConcept C105487726 @default.
• W2077044700 hasConcept C134406635 @default.
• W2077044700 hasConcept C136525101 @default.
• W2077044700 hasConcept C142724271 @default.
• W2077044700 hasConcept C159985019 @default.
• W2077044700 hasConcept C166595027 @default.
• W2077044700 hasConcept C171250308 @default.
• W2077044700 hasConcept C192562407 @default.
• W2077044700 hasConcept C204223013 @default.
• W2077044700 hasConcept C204787440 @default.
• W2077044700 hasConcept C2776798109 @default.
• W2077044700 hasConcept C2779227376 @default.
• W2077044700 hasConcept C37977207 @default.
• W2077044700 hasConcept C41794268 @default.
• W2077044700 hasConcept C49040817 @default.
• W2077044700 hasConcept C527607 @default.
• W2077044700 hasConcept C53524968 @default.
• W2077044700 hasConcept C71924100 @default.
• W2077044700 hasConcept C87976508 @default.
• W2077044700 hasConceptScore W2077044700C104779481 @default.
• W2077044700 hasConceptScore W2077044700C105487726 @default.
• W2077044700 hasConceptScore W2077044700C134406635 @default.
• W2077044700 hasConceptScore W2077044700C136525101 @default.
• W2077044700 hasConceptScore W2077044700C142724271 @default.
• W2077044700 hasConceptScore W2077044700C159985019 @default.
• W2077044700 hasConceptScore W2077044700C166595027 @default.
• W2077044700 hasConceptScore W2077044700C171250308 @default.
• W2077044700 hasConceptScore W2077044700C192562407 @default.
• W2077044700 hasConceptScore W2077044700C204223013 @default.
• W2077044700 hasConceptScore W2077044700C204787440 @default.
• W2077044700 hasConceptScore W2077044700C2776798109 @default.
• W2077044700 hasConceptScore W2077044700C2779227376 @default.
• W2077044700 hasConceptScore W2077044700C37977207 @default.
• W2077044700 hasConceptScore W2077044700C41794268 @default.
• W2077044700 hasConceptScore W2077044700C49040817 @default.
• W2077044700 hasConceptScore W2077044700C527607 @default.
• W2077044700 hasConceptScore W2077044700C53524968 @default.
• W2077044700 hasConceptScore W2077044700C71924100 @default.
• W2077044700 hasConceptScore W2077044700C87976508 @default.
• W2077044700 hasIssue "2" @default.
• W2077044700 hasLocation W20770447001 @default.
• W2077044700 hasOpenAccess W2077044700 @default.
• W2077044700 hasPrimaryLocation W20770447001 @default.

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