FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2077044897> ?p ?o ?g. }

• W2077044897 endingPage "011101" @default.
• W2077044897 startingPage "011101" @default.
• W2077044897 abstract "In this work, we investigated the influence of incorporating zirconia (ZrO 2 ) in HfO 2 gate dielectric on the electrical properties and reliability of n-channel metal oxide semiconductor field effect transistors (nMOSFETs). Detailed film physical, chemical and optical properties of Hf 1- x Zr x O 2 as a function of Zr content were studied using high resolution transmission electron microscopy (HR-TEM), angle resolved X-ray photoelectron spectroscopy (AR-XPS), and spectroscopic ellipsometer (SE). Compared to HfO 2 , Hf 1- x Zr x O 2 provides not only higher k values for further equivalent oxide thickness (EOT) scaling but also lower capacitance–voltage ( C – V ) hysteresis, lower threshold voltage ( V t ) shift (Δ V t ), and higher time-to-failure (TTF) lifetimes. Improved TTF lifetime of as high as three orders of magnitude and 35% lower V t shift were achieved from the Hf 1- x Zr x O 2 gate stack with x =0.8. The improved reliability of the Hf 1- x Zr x O 2 gate dielectric is attributed to the reduced charge trapping in the Hf 1- x Zr x O 2 gate dielectric caused by the ZrO 2 incorporation." @default.
• W2077044897 created "2016-06-24" @default.
• W2077044897 creator A5012235577 @default.
• W2077044897 creator A5014361266 @default.
• W2077044897 creator A5063217791 @default.
• W2077044897 creator A5070250257 @default.
• W2077044897 creator A5070601871 @default.
• W2077044897 creator A5082176307 @default.
• W2077044897 creator A5091561923 @default.
• W2077044897 date "2011-12-16" @default.
• W2077044897 modified "2023-10-18" @default.
• W2077044897 title "Characterization of Hf_1-xZr_xO₂ Gate Dielectrics with 0≤x≤1 Prepared by Atomic Layer Deposition for Metal Oxide Semiconductor Field Effect Transistor Applications" @default.
• W2077044897 cites W1493462079 @default.
• W2077044897 cites W1544231337 @default.
• W2077044897 cites W1612643757 @default.
• W2077044897 cites W1663801344 @default.
• W2077044897 cites W1982298809 @default.
• W2077044897 cites W1987665867 @default.
• W2077044897 cites W1991823658 @default.
• W2077044897 cites W1991965248 @default.
• W2077044897 cites W1996951760 @default.
• W2077044897 cites W1997374247 @default.
• W2077044897 cites W2000904597 @default.
• W2077044897 cites W2004143355 @default.
• W2077044897 cites W2005826182 @default.
• W2077044897 cites W2011150248 @default.
• W2077044897 cites W2019017977 @default.
• W2077044897 cites W2022996942 @default.
• W2077044897 cites W2062268908 @default.
• W2077044897 cites W2070977657 @default.
• W2077044897 cites W2071094147 @default.
• W2077044897 cites W2073492429 @default.
• W2077044897 cites W2073855249 @default.
• W2077044897 cites W2085024863 @default.
• W2077044897 cites W2109791706 @default.
• W2077044897 cites W2159157634 @default.
• W2077044897 doi "https://doi.org/10.1143/jjap.51.011101" @default.
• W2077044897 hasPublicationYear "2011" @default.
• W2077044897 type Work @default.
• W2077044897 sameAs 2077044897 @default.
• W2077044897 citedByCount "10" @default.
• W2077044897 countsByYear W20770448972013 @default.
• W2077044897 countsByYear W20770448972014 @default.
• W2077044897 countsByYear W20770448972015 @default.
• W2077044897 countsByYear W20770448972016 @default.
• W2077044897 countsByYear W20770448972019 @default.
• W2077044897 countsByYear W20770448972021 @default.
• W2077044897 countsByYear W20770448972022 @default.
• W2077044897 crossrefType "journal-article" @default.
• W2077044897 hasAuthorship W2077044897A5012235577 @default.
• W2077044897 hasAuthorship W2077044897A5014361266 @default.
• W2077044897 hasAuthorship W2077044897A5063217791 @default.
• W2077044897 hasAuthorship W2077044897A5070250257 @default.
• W2077044897 hasAuthorship W2077044897A5070601871 @default.
• W2077044897 hasAuthorship W2077044897A5082176307 @default.
• W2077044897 hasAuthorship W2077044897A5091561923 @default.
• W2077044897 hasConcept C113196181 @default.
• W2077044897 hasConcept C121332964 @default.
• W2077044897 hasConcept C123299182 @default.
• W2077044897 hasConcept C133386390 @default.
• W2077044897 hasConcept C145598152 @default.
• W2077044897 hasConcept C16317505 @default.
• W2077044897 hasConcept C165801399 @default.
• W2077044897 hasConcept C166972891 @default.
• W2077044897 hasConcept C171250308 @default.
• W2077044897 hasConcept C172385210 @default.
• W2077044897 hasConcept C175708663 @default.
• W2077044897 hasConcept C18293161 @default.
• W2077044897 hasConcept C185592680 @default.
• W2077044897 hasConcept C19067145 @default.
• W2077044897 hasConcept C192562407 @default.
• W2077044897 hasConcept C2361726 @default.
• W2077044897 hasConcept C26873012 @default.
• W2077044897 hasConcept C43617362 @default.
• W2077044897 hasConcept C46141821 @default.
• W2077044897 hasConcept C49040817 @default.
• W2077044897 hasConcept C52780932 @default.
• W2077044897 hasConcept C62520636 @default.
• W2077044897 hasConceptScore W2077044897C113196181 @default.
• W2077044897 hasConceptScore W2077044897C121332964 @default.
• W2077044897 hasConceptScore W2077044897C123299182 @default.
• W2077044897 hasConceptScore W2077044897C133386390 @default.
• W2077044897 hasConceptScore W2077044897C145598152 @default.
• W2077044897 hasConceptScore W2077044897C16317505 @default.
• W2077044897 hasConceptScore W2077044897C165801399 @default.
• W2077044897 hasConceptScore W2077044897C166972891 @default.
• W2077044897 hasConceptScore W2077044897C171250308 @default.
• W2077044897 hasConceptScore W2077044897C172385210 @default.
• W2077044897 hasConceptScore W2077044897C175708663 @default.
• W2077044897 hasConceptScore W2077044897C18293161 @default.
• W2077044897 hasConceptScore W2077044897C185592680 @default.
• W2077044897 hasConceptScore W2077044897C19067145 @default.
• W2077044897 hasConceptScore W2077044897C192562407 @default.
• W2077044897 hasConceptScore W2077044897C2361726 @default.
• W2077044897 hasConceptScore W2077044897C26873012 @default.
• W2077044897 hasConceptScore W2077044897C43617362 @default.
• W2077044897 hasConceptScore W2077044897C46141821 @default.
• W2077044897 hasConceptScore W2077044897C49040817 @default.

• next