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- W2077071084 abstract "Tunable 5.2 GHz bulk acoustic wave resonators utilizing BaxSr1−xTiO3 ferroelectric films with similar intrinsic properties but different interface roughness are fabricated and characterized. Increase in roughness from 3.2 nm up to 6.9 nm results in reduction in Q-factor from 350 down to 150 due to extrinsic acoustic losses caused by wave scattering at reflections from rough interfaces and other mechanisms associated with roughness. The increased roughness is a result of distortion of Pt bottom electrode caused by formation of heterogeneous enclosures of TiO2−x in the Pt layer." @default.
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- W2077071084 date "2011-07-15" @default.
- W2077071084 modified "2023-10-12" @default.
- W2077071084 title "Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators" @default.
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- W2077071084 doi "https://doi.org/10.1063/1.3610513" @default.
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