Matches in SemOpenAlex for { <https://semopenalex.org/work/W2077261609> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2077261609 endingPage "812" @default.
- W2077261609 startingPage "809" @default.
- W2077261609 abstract "P+ and Ar+ implanted HPR-204 (base polymer is cresol novolak resin [1]) was studied. Carbonized resist layers formed during ion implantation were collected and analyzed by NMR (nuclear magnetic resonance). Implanted argon atoms only carbonize polymers. However, implanted phosphorous atoms also chemically react with polymers. Aromatic parts of the resist are influenced by ion implantation more easily than aliphatic parts. From NMR spectra of carbonized layers and triphenylphosphine, we confirmed that the methylene in the main chain of the novolak resin was substituted by a phosphorous atom connected with two phenyls in the carbonized layer of the P+ implanted polymer. We also present models of the structure of aliphatic parts." @default.
- W2077261609 created "2016-06-24" @default.
- W2077261609 creator A5039380668 @default.
- W2077261609 creator A5052403672 @default.
- W2077261609 creator A5055525968 @default.
- W2077261609 date "1989-03-01" @default.
- W2077261609 modified "2023-10-18" @default.
- W2077261609 title "Ion implantation change in the chemical structure of a resist" @default.
- W2077261609 cites W1963920488 @default.
- W2077261609 cites W1974746591 @default.
- W2077261609 cites W1976040040 @default.
- W2077261609 cites W1999641873 @default.
- W2077261609 cites W2038095264 @default.
- W2077261609 cites W2058091262 @default.
- W2077261609 cites W2058987491 @default.
- W2077261609 cites W2070024425 @default.
- W2077261609 doi "https://doi.org/10.1016/0168-583x(89)90902-6" @default.
- W2077261609 hasPublicationYear "1989" @default.
- W2077261609 type Work @default.
- W2077261609 sameAs 2077261609 @default.
- W2077261609 citedByCount "13" @default.
- W2077261609 crossrefType "journal-article" @default.
- W2077261609 hasAuthorship W2077261609A5039380668 @default.
- W2077261609 hasAuthorship W2077261609A5052403672 @default.
- W2077261609 hasAuthorship W2077261609A5055525968 @default.
- W2077261609 hasConcept C145148216 @default.
- W2077261609 hasConcept C154877778 @default.
- W2077261609 hasConcept C159985019 @default.
- W2077261609 hasConcept C171250308 @default.
- W2077261609 hasConcept C178790620 @default.
- W2077261609 hasConcept C185592680 @default.
- W2077261609 hasConcept C188027245 @default.
- W2077261609 hasConcept C192562407 @default.
- W2077261609 hasConcept C26771246 @default.
- W2077261609 hasConcept C2777454769 @default.
- W2077261609 hasConcept C2779227376 @default.
- W2077261609 hasConcept C41823505 @default.
- W2077261609 hasConcept C521977710 @default.
- W2077261609 hasConcept C53524968 @default.
- W2077261609 hasConceptScore W2077261609C145148216 @default.
- W2077261609 hasConceptScore W2077261609C154877778 @default.
- W2077261609 hasConceptScore W2077261609C159985019 @default.
- W2077261609 hasConceptScore W2077261609C171250308 @default.
- W2077261609 hasConceptScore W2077261609C178790620 @default.
- W2077261609 hasConceptScore W2077261609C185592680 @default.
- W2077261609 hasConceptScore W2077261609C188027245 @default.
- W2077261609 hasConceptScore W2077261609C192562407 @default.
- W2077261609 hasConceptScore W2077261609C26771246 @default.
- W2077261609 hasConceptScore W2077261609C2777454769 @default.
- W2077261609 hasConceptScore W2077261609C2779227376 @default.
- W2077261609 hasConceptScore W2077261609C41823505 @default.
- W2077261609 hasConceptScore W2077261609C521977710 @default.
- W2077261609 hasConceptScore W2077261609C53524968 @default.
- W2077261609 hasIssue "1-4" @default.
- W2077261609 hasLocation W20772616091 @default.
- W2077261609 hasOpenAccess W2077261609 @default.
- W2077261609 hasPrimaryLocation W20772616091 @default.
- W2077261609 hasRelatedWork W1974253895 @default.
- W2077261609 hasRelatedWork W2022466623 @default.
- W2077261609 hasRelatedWork W2049953843 @default.
- W2077261609 hasRelatedWork W2054796528 @default.
- W2077261609 hasRelatedWork W2074528267 @default.
- W2077261609 hasRelatedWork W2081152130 @default.
- W2077261609 hasRelatedWork W2088715418 @default.
- W2077261609 hasRelatedWork W2097868149 @default.
- W2077261609 hasRelatedWork W2647262206 @default.
- W2077261609 hasRelatedWork W4386552230 @default.
- W2077261609 hasVolume "39" @default.
- W2077261609 isParatext "false" @default.
- W2077261609 isRetracted "false" @default.
- W2077261609 magId "2077261609" @default.
- W2077261609 workType "article" @default.