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• W2077263159 abstract "The peculiarities of high-resolution measurements in grazing-incidence diffraction (GID) are studied, both theoretically and experimentally. It is shown that complete discrimination between coherent reflection and diffuse scattering due to defects in GID requires a three-dimensional mapping of reciprocal space. These measurements can be performed using a combination of analyzer crystal and position-sensitive detector for angular analysis of scattered x-rays in mutually perpendicular planes. The equations for the resolution function of GID experiments are given and applied to the interpretation of GID measurements taken from an AlAs/GaAs superlattice. The discrimination of diffuse scattering due to interfacial roughness in the superlattice is demonstrated." @default.
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• W2077263159 date "1997-01-01" @default.
• W2077263159 modified "2023-10-16" @default.
• W2077263159 title "High-resolution grazing-incidence x-ray diffraction for characterization of defects in crystal surface layers" @default.
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• W2077263159 doi "https://doi.org/10.1063/1.363838" @default.
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