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• W2077375015 abstract "Convergent beam electron diffraction (CBED), nano-beam electron diffraction (NBED or NBD), high resolution imaging (HRTEM and HRSTEM) and dark field electron holography (DFEH or HoloDark) are five TEM based techniques able to quantitatively measure strain at the nanometer scale. In order to demonstrate the advantages and disadvantages of each technique, two samples composed of epitaxial silicon-germanium layers embedded in a silicon matrix have been investigated. The five techniques are then compared in terms of strain precision and accuracy, spatial resolution, field of view, mapping abilities and ease of performance and analysis." @default.
• W2077375015 created "2016-06-24" @default.
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• W2077375015 date "2013-08-01" @default.
• W2077375015 modified "2023-10-18" @default.
• W2077375015 title "Strain measurement at the nanoscale: Comparison between convergent beam electron diffraction, nano-beam electron diffraction, high resolution imaging and dark field electron holography" @default.
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• W2077375015 doi "https://doi.org/10.1016/j.ultramic.2013.03.014" @default.
• W2077375015 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/23673283" @default.
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