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- W2077377472 abstract "Abstract Low energy reactive species are now used extensively for etching materials in the semiconductor industry using plasma processing. We have developed a large area filamentless ion source suitable for carrying out reactive ion beam processing of 5 and 6 in. semiconductor wafers at ion energies as low as 80 eV. Current densities of approximately 1 mA cm −2 have been achieved. The performance of the system has been characterised in oxygen over a very wide range of operating parameters. In addition we have used the ion source both for reactive ion beam etching of polyimide as well as carrying out more general surface erosion studies of materials. Preliminary results will be presented." @default.
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- W2077377472 date "1989-02-01" @default.
- W2077377472 modified "2023-09-30" @default.
- W2077377472 title "Development and use of a large area ultralow energy reactive ion beam" @default.
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- W2077377472 doi "https://doi.org/10.1016/0168-583x(89)90144-4" @default.
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