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- W2077402619 abstract "physica status solidi (a)Volume 90, Issue 2 p. K225-K227 Short Note Influence of electron lithography on electrical parameters of MOS structures J. Osvald, J. Osvald Electrotechnical Institute, Centre of Electrophysical Research of the Slovak Academy of Sciences, Brati slava Search for more papers by this author J. Osvald, J. Osvald Electrotechnical Institute, Centre of Electrophysical Research of the Slovak Academy of Sciences, Brati slava Search for more papers by this author First published: 16 August 1985 https://doi.org/10.1002/pssa.2210900269Citations: 1 Dúbravská cesta 9, 842 39 Bratislava, Czechoslovakia. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Citing Literature Volume90, Issue216 August 1985Pages K225-K227 RelatedInformation" @default.
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- W2077402619 title "Influence of electron lithography on electrical parameters of MOS structures" @default.
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