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- W2077438510 abstract "Ultra-thin mirror has a large diameter-thickness rate, so it will be more deformable because of the change of workingconditions. We have performed an ultra thin mirror with 1.5mm glass membrane of 340mm diameter which is attached toa sample support structure through a set of precise screws. In this paper, some analyse and computing simulation foractive ultra thin mirror surface by using finite element method (FEM) are introduced:(1) simulated an ultra thin mirrorwith a large ratio by software patran;(2) With Zernike polynomials several low-order aberrations are got, whichsimulate the profile error after ultra thin mirror fabrication and the deformation because of change of working conditions;(3) After getting the influence function of single actuator, the optimum scheme of actuator array for an ultra thin activemirror with maximum corrective capability is achieved;(4)The optimal size of flange which attaches the actuator to glassmembrane is determined;(5) The test for correcting the surface Figure of this sample mirror demonstrates the correctnessof result of FEM." @default.
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- W2077438510 date "2009-05-11" @default.
- W2077438510 modified "2023-09-23" @default.
- W2077438510 title "FEM analysis and experiment study of an ultrathin active mirror" @default.
- W2077438510 doi "https://doi.org/10.1117/12.831431" @default.
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