Matches in SemOpenAlex for { <https://semopenalex.org/work/W2077482942> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W2077482942 endingPage "1018" @default.
- W2077482942 startingPage "1014" @default.
- W2077482942 abstract "This paper presents the design and fabrication of a novel deformable micro-mirror which is mainly composed of a silicon-based lead zirconate titanate (PbZr53Ti47O3, PZT) film using an inexpensive, simple and reliable sol?gel method. In accordance with the converse piezoelectric effect, deformation of the new micro-mirror, with the structure , can be achieved by changing the thickness of the PZT film by controlling the applied voltage. The new micro-mirror has the advantage of small size, light weight and fast response time over a conventional one based on the bimetal thermal effect or electrostatic force principle. An x-ray diffraction pattern of the fabricated PZT film was obtained and the deformation of the PZT thickness was tested with a digital interferometer. Experiments demonstrated that a micro-mirror made from the structure of PZT film could alter the thickness of the film and be practicably used in an adaptive optical system." @default.
- W2077482942 created "2016-06-24" @default.
- W2077482942 creator A5011740024 @default.
- W2077482942 creator A5037980188 @default.
- W2077482942 creator A5047524256 @default.
- W2077482942 creator A5076699095 @default.
- W2077482942 creator A5085655988 @default.
- W2077482942 date "2007-09-26" @default.
- W2077482942 modified "2023-10-17" @default.
- W2077482942 title "Study of a deformable micro-mirror based on PZT films" @default.
- W2077482942 cites W1975722135 @default.
- W2077482942 cites W1992881859 @default.
- W2077482942 cites W2026532002 @default.
- W2077482942 cites W2056774784 @default.
- W2077482942 cites W2061296491 @default.
- W2077482942 cites W2066270261 @default.
- W2077482942 cites W2096729515 @default.
- W2077482942 cites W2146089412 @default.
- W2077482942 doi "https://doi.org/10.1088/1464-4258/9/11/007" @default.
- W2077482942 hasPublicationYear "2007" @default.
- W2077482942 type Work @default.
- W2077482942 sameAs 2077482942 @default.
- W2077482942 citedByCount "1" @default.
- W2077482942 crossrefType "journal-article" @default.
- W2077482942 hasAuthorship W2077482942A5011740024 @default.
- W2077482942 hasAuthorship W2077482942A5037980188 @default.
- W2077482942 hasAuthorship W2077482942A5047524256 @default.
- W2077482942 hasAuthorship W2077482942A5076699095 @default.
- W2077482942 hasAuthorship W2077482942A5085655988 @default.
- W2077482942 hasConcept C120665830 @default.
- W2077482942 hasConcept C121332964 @default.
- W2077482942 hasConcept C132771110 @default.
- W2077482942 hasConcept C136872047 @default.
- W2077482942 hasConcept C192562407 @default.
- W2077482942 hasConceptScore W2077482942C120665830 @default.
- W2077482942 hasConceptScore W2077482942C121332964 @default.
- W2077482942 hasConceptScore W2077482942C132771110 @default.
- W2077482942 hasConceptScore W2077482942C136872047 @default.
- W2077482942 hasConceptScore W2077482942C192562407 @default.
- W2077482942 hasIssue "11" @default.
- W2077482942 hasLocation W20774829421 @default.
- W2077482942 hasOpenAccess W2077482942 @default.
- W2077482942 hasPrimaryLocation W20774829421 @default.
- W2077482942 hasRelatedWork W1649740916 @default.
- W2077482942 hasRelatedWork W2013380794 @default.
- W2077482942 hasRelatedWork W2017653500 @default.
- W2077482942 hasRelatedWork W2035149871 @default.
- W2077482942 hasRelatedWork W2111942120 @default.
- W2077482942 hasRelatedWork W2113858713 @default.
- W2077482942 hasRelatedWork W2164382043 @default.
- W2077482942 hasRelatedWork W3192076521 @default.
- W2077482942 hasRelatedWork W4221090247 @default.
- W2077482942 hasRelatedWork W4298130675 @default.
- W2077482942 hasVolume "9" @default.
- W2077482942 isParatext "false" @default.
- W2077482942 isRetracted "false" @default.
- W2077482942 magId "2077482942" @default.
- W2077482942 workType "article" @default.