FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2077488968> ?p ?o ?g. }

• W2077488968 endingPage "10089" @default.
• W2077488968 startingPage "10076" @default.
• W2077488968 abstract "A comprehensive study of microwave (MW) activated B2H6/CH4/Ar/H2 plasmas used for the chemical vapor deposition of B-doped diamond is reported. Absolute column densities of ground state B atoms, electronically excited H(n = 2) atoms, and BH, CH, and C2 radicals have been determined by cavity ring down spectroscopy, as functions of height (z) above a molybdenum substrate and of the plasma process conditions (B2H6, CH4, and Ar partial pressures; total pressure, p; and supplied MW power, P). Optical emission spectroscopy has also been used to explore variations in the relative densities of electronically excited H atoms, H2 molecules, and BH, CH, and C2 radicals, as functions of the same process conditions. These experimental data are complemented by extensive 2D(r, z) modeling of the plasma chemistry, which result in substantial refinements to the existing B/C/H/O thermochemistry and chemical kinetics. Comparison with the results of analogous experimental/modeling studies of B2H6/Ar/H2 and CH4/Ar/H2 plasmas in the same MW reactor show that: (i) trace B2H6 additions have negligible effect on a pre-established CH4/Ar/H2 plasma; (ii) the spatial extent of the B and BH concentration profiles in a B2H6/CH4/Ar/H2 plasma is smaller than in a hydrocarbon-free B2H6/Ar/H2 plasma operating at the same p, P, etc.; (iii) B/C coupling reactions (probably supplemented by reactions involving trace O2 present as air impurity in the process gas mixture) play an important role in determining the local BHx (x = 0−3) radical densities; and (iv) gas phase B atoms are the most likely source of the boron that incorporates into the growing B-doped diamond film." @default.
• W2077488968 created "2016-06-24" @default.
• W2077488968 creator A5019743038 @default.
• W2077488968 creator A5026333033 @default.
• W2077488968 creator A5061874643 @default.
• W2077488968 creator A5065028540 @default.
• W2077488968 creator A5075043746 @default.
• W2077488968 creator A5088999737 @default.
• W2077488968 date "2010-08-25" @default.
• W2077488968 modified "2023-10-03" @default.
• W2077488968 title "Spectroscopic and Modeling Investigations of the Gas Phase Chemistry and Composition in Microwave Plasma Activated B₂H₆/CH₄/Ar/H₂ Mixtures" @default.
• W2077488968 cites W1976565612 @default.
• W2077488968 cites W1977687753 @default.
• W2077488968 cites W1983943228 @default.
• W2077488968 cites W1986658177 @default.
• W2077488968 cites W1997261694 @default.
• W2077488968 cites W1999474483 @default.
• W2077488968 cites W2000216871 @default.
• W2077488968 cites W2001090435 @default.
• W2077488968 cites W2007952213 @default.
• W2077488968 cites W2015801219 @default.
• W2077488968 cites W2018922596 @default.
• W2077488968 cites W2022028647 @default.
• W2077488968 cites W2022256089 @default.
• W2077488968 cites W2025531338 @default.
• W2077488968 cites W2030862399 @default.
• W2077488968 cites W2033076822 @default.
• W2077488968 cites W2036267434 @default.
• W2077488968 cites W2037943279 @default.
• W2077488968 cites W2041051419 @default.
• W2077488968 cites W2042961648 @default.
• W2077488968 cites W2048457987 @default.
• W2077488968 cites W2050310354 @default.
• W2077488968 cites W2059275686 @default.
• W2077488968 cites W2061961086 @default.
• W2077488968 cites W2062585468 @default.
• W2077488968 cites W2064569197 @default.
• W2077488968 cites W2064838043 @default.
• W2077488968 cites W2069890046 @default.
• W2077488968 cites W2088588394 @default.
• W2077488968 cites W2093455423 @default.
• W2077488968 cites W2094896623 @default.
• W2077488968 cites W2109383870 @default.
• W2077488968 cites W2110884633 @default.
• W2077488968 cites W2118907460 @default.
• W2077488968 cites W2120731005 @default.
• W2077488968 cites W2128353329 @default.
• W2077488968 cites W2140361452 @default.
• W2077488968 cites W2144633925 @default.
• W2077488968 cites W2164313343 @default.
• W2077488968 cites W2164517490 @default.
• W2077488968 cites W2206116359 @default.
• W2077488968 cites W2323739007 @default.
• W2077488968 cites W2949093123 @default.
• W2077488968 cites W3124655723 @default.
• W2077488968 cites W4244778327 @default.
• W2077488968 cites W4250996020 @default.
• W2077488968 cites W68472225 @default.
• W2077488968 cites W88538569 @default.
• W2077488968 doi "https://doi.org/10.1021/jp104532y" @default.
• W2077488968 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/20735120" @default.
• W2077488968 hasPublicationYear "2010" @default.
• W2077488968 type Work @default.
• W2077488968 sameAs 2077488968 @default.
• W2077488968 citedByCount "32" @default.
• W2077488968 countsByYear W20774889682012 @default.
• W2077488968 countsByYear W20774889682014 @default.
• W2077488968 countsByYear W20774889682015 @default.
• W2077488968 countsByYear W20774889682016 @default.
• W2077488968 countsByYear W20774889682017 @default.
• W2077488968 countsByYear W20774889682018 @default.
• W2077488968 countsByYear W20774889682019 @default.
• W2077488968 countsByYear W20774889682020 @default.
• W2077488968 countsByYear W20774889682021 @default.
• W2077488968 countsByYear W20774889682023 @default.
• W2077488968 crossrefType "journal-article" @default.
• W2077488968 hasAuthorship W2077488968A5019743038 @default.
• W2077488968 hasAuthorship W2077488968A5026333033 @default.
• W2077488968 hasAuthorship W2077488968A5061874643 @default.
• W2077488968 hasAuthorship W2077488968A5065028540 @default.
• W2077488968 hasAuthorship W2077488968A5075043746 @default.
• W2077488968 hasAuthorship W2077488968A5088999737 @default.
• W2077488968 hasConcept C113196181 @default.
• W2077488968 hasConcept C121332964 @default.
• W2077488968 hasConcept C139066938 @default.
• W2077488968 hasConcept C147789679 @default.
• W2077488968 hasConcept C178790620 @default.
• W2077488968 hasConcept C181500209 @default.
• W2077488968 hasConcept C184779094 @default.
• W2077488968 hasConcept C185592680 @default.
• W2077488968 hasConcept C29563950 @default.
• W2077488968 hasConcept C62520636 @default.
• W2077488968 hasConcept C82706917 @default.
• W2077488968 hasConceptScore W2077488968C113196181 @default.
• W2077488968 hasConceptScore W2077488968C121332964 @default.
• W2077488968 hasConceptScore W2077488968C139066938 @default.
• W2077488968 hasConceptScore W2077488968C147789679 @default.
• W2077488968 hasConceptScore W2077488968C178790620 @default.

• next