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- W2077642725 abstract "An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data." @default.
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- W2077642725 date "2012-09-06" @default.
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- W2077642725 title "Profile estimation for Pt submicron wire on rough Si substrate from experimental data" @default.
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- W2077642725 doi "https://doi.org/10.1364/oe.20.021678" @default.
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