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• W2077681570 endingPage "3975" @default.
• W2077681570 startingPage "3971" @default.
• W2077681570 abstract "Diamond-like carbon (DLC) film deposited using C60 vapor with simultaneous irradiation of an Ar cluster ion beam was characterized by a near edge X-ray absorption fine structure (NEXAFS), in order to optimize the hard DLC film deposition conditions. Contents of sp2 orbitals in the films, which were estimated from NEXAFS spectra, are 30% lower than that of a conventional DLC film deposited by a RF plasma method. Those contents were obtained under the flux ratio of the C60 molecules to the Ar cluster ions to range from 1 to 20, at 5 keV of Ar cluster ion acceleration energy. Average hardness of the films was 50 GPa under these flux ratios. This hardness was three times higher than that of a conventional DLC film. Furthermore, the lowest sp2 content and above-mentioned high hardness were obtained at room temperature of the substrate when the depositions were performed in the range of the substrate temperature from room temperature to 250°C." @default.
• W2077681570 created "2016-06-24" @default.
• W2077681570 creator A5009414859 @default.
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• W2077681570 date "2003-06-30" @default.
• W2077681570 modified "2023-09-26" @default.
• W2077681570 title "Near Edge X-Ray Absorption Fine Structure Study for Optimization of Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam" @default.
• W2077681570 cites W1997331727 @default.
• W2077681570 cites W2031918282 @default.
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• W2077681570 doi "https://doi.org/10.1143/jjap.42.3971" @default.
• W2077681570 hasPublicationYear "2003" @default.
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