FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2077764032> ?p ?o ?g. }

• W2077764032 endingPage "C678" @default.
• W2077764032 startingPage "C678" @default.
• W2077764032 abstract "Metallorganic chemical vapor deposition (MOCVD) of thin (<100 nm) (PZT) films was performed for applications in high density (>16 megabit) ferroelectric memory devices. The growth temperatures were set between 420 and 530°C to obtain a smooth surface morphology and to prevent damage to the underlying reaction barrier layer. A dome-type CVD chamber with a single- or double-cocktail precursor solution liquid delivery system was used for deposition. Four different precursor solution sets were investigated from the viewpoint of mass-production compatibility. The types of solvents had a great influence on the vaporizer lifetime and the level of oxygen incorporation into the PZT film that critically affected the electrical performance. The deposition behavior, including the within-wafer-thickness uniformity, was also dependent on the type of the precursor solutions. The oxygen injection method had a great influence on the Pb composition, the interfacial reaction between the film and the Ir electrode as well as the electrical properties. When nonpreheated oxygen was injected, the interfacial reaction became a serious problem resulting in the formation of and layers without sufficient oxygen incorporation into the PZT film. Preheated oxygen was effective in incorporating Pb into the PZT films without serious interfacial reactions except for thin layer formation. © 2003 The Electrochemical Society. All rights reserved." @default.
• W2077764032 created "2016-06-24" @default.
• W2077764032 creator A5004296612 @default.
• W2077764032 creator A5024897793 @default.
• W2077764032 creator A5027075775 @default.
• W2077764032 creator A5037303655 @default.
• W2077764032 creator A5037345146 @default.
• W2077764032 creator A5047692613 @default.
• W2077764032 creator A5054362556 @default.
• W2077764032 creator A5055735482 @default.
• W2077764032 creator A5061617122 @default.
• W2077764032 creator A5076304730 @default.
• W2077764032 creator A5085642896 @default.
• W2077764032 date "2003-01-01" @default.
• W2077764032 modified "2023-09-27" @default.
• W2077764032 title "MOCVD of PZT Thin Films with Different Precursor Solutions for Testing Mass-Production Compatibility" @default.
• W2077764032 cites W1967462402 @default.
• W2077764032 cites W1988508728 @default.
• W2077764032 cites W2011150584 @default.
• W2077764032 cites W2021197793 @default.
• W2077764032 cites W2024404910 @default.
• W2077764032 cites W2033093140 @default.
• W2077764032 cites W2044683682 @default.
• W2077764032 cites W2065419395 @default.
• W2077764032 cites W2083958163 @default.
• W2077764032 doi "https://doi.org/10.1149/1.1602082" @default.
• W2077764032 hasPublicationYear "2003" @default.
• W2077764032 type Work @default.
• W2077764032 sameAs 2077764032 @default.
• W2077764032 citedByCount "13" @default.
• W2077764032 countsByYear W20777640322017 @default.
• W2077764032 crossrefType "journal-article" @default.
• W2077764032 hasAuthorship W2077764032A5004296612 @default.
• W2077764032 hasAuthorship W2077764032A5024897793 @default.
• W2077764032 hasAuthorship W2077764032A5027075775 @default.
• W2077764032 hasAuthorship W2077764032A5037303655 @default.
• W2077764032 hasAuthorship W2077764032A5037345146 @default.
• W2077764032 hasAuthorship W2077764032A5047692613 @default.
• W2077764032 hasAuthorship W2077764032A5054362556 @default.
• W2077764032 hasAuthorship W2077764032A5055735482 @default.
• W2077764032 hasAuthorship W2077764032A5061617122 @default.
• W2077764032 hasAuthorship W2077764032A5076304730 @default.
• W2077764032 hasAuthorship W2077764032A5085642896 @default.
• W2077764032 hasConcept C110738630 @default.
• W2077764032 hasConcept C127413603 @default.
• W2077764032 hasConcept C133386390 @default.
• W2077764032 hasConcept C147789679 @default.
• W2077764032 hasConcept C160671074 @default.
• W2077764032 hasConcept C171250308 @default.
• W2077764032 hasConcept C17525397 @default.
• W2077764032 hasConcept C175665537 @default.
• W2077764032 hasConcept C178790620 @default.
• W2077764032 hasConcept C185592680 @default.
• W2077764032 hasConcept C19067145 @default.
• W2077764032 hasConcept C192562407 @default.
• W2077764032 hasConcept C2779227376 @default.
• W2077764032 hasConcept C42360764 @default.
• W2077764032 hasConcept C49040817 @default.
• W2077764032 hasConcept C52859227 @default.
• W2077764032 hasConcept C540031477 @default.
• W2077764032 hasConcept C57410435 @default.
• W2077764032 hasConcept C79090758 @default.
• W2077764032 hasConceptScore W2077764032C110738630 @default.
• W2077764032 hasConceptScore W2077764032C127413603 @default.
• W2077764032 hasConceptScore W2077764032C133386390 @default.
• W2077764032 hasConceptScore W2077764032C147789679 @default.
• W2077764032 hasConceptScore W2077764032C160671074 @default.
• W2077764032 hasConceptScore W2077764032C171250308 @default.
• W2077764032 hasConceptScore W2077764032C17525397 @default.
• W2077764032 hasConceptScore W2077764032C175665537 @default.
• W2077764032 hasConceptScore W2077764032C178790620 @default.
• W2077764032 hasConceptScore W2077764032C185592680 @default.
• W2077764032 hasConceptScore W2077764032C19067145 @default.
• W2077764032 hasConceptScore W2077764032C192562407 @default.
• W2077764032 hasConceptScore W2077764032C2779227376 @default.
• W2077764032 hasConceptScore W2077764032C42360764 @default.
• W2077764032 hasConceptScore W2077764032C49040817 @default.
• W2077764032 hasConceptScore W2077764032C52859227 @default.
• W2077764032 hasConceptScore W2077764032C540031477 @default.
• W2077764032 hasConceptScore W2077764032C57410435 @default.
• W2077764032 hasConceptScore W2077764032C79090758 @default.
• W2077764032 hasIssue "10" @default.
• W2077764032 hasLocation W20777640321 @default.
• W2077764032 hasOpenAccess W2077764032 @default.
• W2077764032 hasPrimaryLocation W20777640321 @default.
• W2077764032 hasRelatedWork W1485862302 @default.
• W2077764032 hasRelatedWork W1966846703 @default.
• W2077764032 hasRelatedWork W1972216760 @default.
• W2077764032 hasRelatedWork W1998542313 @default.
• W2077764032 hasRelatedWork W2009817879 @default.
• W2077764032 hasRelatedWork W2024404910 @default.
• W2077764032 hasRelatedWork W2094787262 @default.
• W2077764032 hasRelatedWork W2160856925 @default.
• W2077764032 hasRelatedWork W2358461634 @default.
• W2077764032 hasRelatedWork W4230065958 @default.
• W2077764032 hasVolume "150" @default.
• W2077764032 isParatext "false" @default.
• W2077764032 isRetracted "false" @default.

• next