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- W2077801370 abstract "Several charge dissipation materials were evaluated for their ability to improve the overlay accuracy during phase shift mask (PSM) registered writing on a MEBES system. These included an organic conductive polymer and a number of thin inorganic films, which were applied above or below the resist on a coated mask. When used with the resists, all conductive materials evaluated were capable of providing adequate charge dissipation during registered writing. Overlay accuracy of mean + 3 sigma <EQ 0.07 micrometers was obtained in both axes. The water-cast conductive polymer was found to be the easiest to use." @default.
- W2077801370 created "2016-06-24" @default.
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- W2077801370 date "1994-12-07" @default.
- W2077801370 modified "2023-09-23" @default.
- W2077801370 title "<title>Application of charge-dissipation material in MEBES phase-shift mask fabrication</title>" @default.
- W2077801370 doi "https://doi.org/10.1117/12.195834" @default.
- W2077801370 hasPublicationYear "1994" @default.
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