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- W2078021213 abstract "The 180 keV Ca+ and Ar+ ions were homogeneously implanted in GaN at temperature of liquid nitrogen. High resolution x-ray diffraction was used to monitor the change of GaN (0002) peak with the dose ranging from 5×1012 to 1×1016 cm−2. It has been found that with increasing dose a new peak beside the GaN (0002) peak appears, grows up, and gradually shrinks until disappearance with arising of the amorphous peak, accompanied with a shift towards smaller angles. The difference between Ca+ and Ar+ implantation is discussed. Expansion of GaN crystal lattice due to Ca+ and Ar+ implantation accounts for this phenomenon and is confirmed by TEM results." @default.
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- W2078021213 date "1997-10-20" @default.
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- W2078021213 title "Lattice expansion of Ca and Ar ion implanted GaN" @default.
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- W2078021213 doi "https://doi.org/10.1063/1.120059" @default.
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