Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078030149> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2078030149 endingPage "3222" @default.
- W2078030149 startingPage "3215" @default.
- W2078030149 abstract "Chemical vapor deposited layers are required as interdiffusion barriers for the fabrication of microelectronic devices. The deposition of from a metallorganic precursor, tetrakis‐(dimethylamido)‐titanium (IV), has been investigated and compared using three different experimental approaches: the thermal decomposition of the precursor, its thermal reaction with ammonia, and its reaction with mixtures which have been activated in a remote microwave plasma (2.46 GHz). The experiments have been carried out at moderate temperatures of 250–500°C and pressures between 0.5 and 5 Torr. Mass spectrometric analysis of the effluent gases have been performed and reaction mechanisms for the different experimental conditions are postulated based on these investigations. The application of remote plasma activated mixtures instead of ammonia is a major breakthrough in controlling the reactivity of the chemical partners and is proposed to be also used during formation from ." @default.
- W2078030149 created "2016-06-24" @default.
- W2078030149 creator A5014292658 @default.
- W2078030149 creator A5030660292 @default.
- W2078030149 creator A5080626219 @default.
- W2078030149 date "1993-11-01" @default.
- W2078030149 modified "2023-10-15" @default.
- W2078030149 title "Film Properties of CVD Titanium Nitride Deposited with Organometallic Precursors at Low Pressure Using Inert Gases, Ammonia, or Remote Activation" @default.
- W2078030149 doi "https://doi.org/10.1149/1.2221013" @default.
- W2078030149 hasPublicationYear "1993" @default.
- W2078030149 type Work @default.
- W2078030149 sameAs 2078030149 @default.
- W2078030149 citedByCount "68" @default.
- W2078030149 countsByYear W20780301492012 @default.
- W2078030149 countsByYear W20780301492013 @default.
- W2078030149 countsByYear W20780301492014 @default.
- W2078030149 countsByYear W20780301492015 @default.
- W2078030149 countsByYear W20780301492016 @default.
- W2078030149 countsByYear W20780301492021 @default.
- W2078030149 crossrefType "journal-article" @default.
- W2078030149 hasAuthorship W2078030149A5014292658 @default.
- W2078030149 hasAuthorship W2078030149A5030660292 @default.
- W2078030149 hasAuthorship W2078030149A5080626219 @default.
- W2078030149 hasConcept C121332964 @default.
- W2078030149 hasConcept C127413603 @default.
- W2078030149 hasConcept C142724271 @default.
- W2078030149 hasConcept C154256306 @default.
- W2078030149 hasConcept C160434732 @default.
- W2078030149 hasConcept C171250308 @default.
- W2078030149 hasConcept C177801218 @default.
- W2078030149 hasConcept C178790620 @default.
- W2078030149 hasConcept C179104552 @default.
- W2078030149 hasConcept C185592680 @default.
- W2078030149 hasConcept C187937830 @default.
- W2078030149 hasConcept C192562407 @default.
- W2078030149 hasConcept C204787440 @default.
- W2078030149 hasConcept C2776382133 @default.
- W2078030149 hasConcept C2776910235 @default.
- W2078030149 hasConcept C2777431650 @default.
- W2078030149 hasConcept C2780740191 @default.
- W2078030149 hasConcept C30646810 @default.
- W2078030149 hasConcept C42360764 @default.
- W2078030149 hasConcept C506065880 @default.
- W2078030149 hasConcept C537208039 @default.
- W2078030149 hasConcept C544956773 @default.
- W2078030149 hasConcept C57410435 @default.
- W2078030149 hasConcept C71924100 @default.
- W2078030149 hasConcept C97355855 @default.
- W2078030149 hasConceptScore W2078030149C121332964 @default.
- W2078030149 hasConceptScore W2078030149C127413603 @default.
- W2078030149 hasConceptScore W2078030149C142724271 @default.
- W2078030149 hasConceptScore W2078030149C154256306 @default.
- W2078030149 hasConceptScore W2078030149C160434732 @default.
- W2078030149 hasConceptScore W2078030149C171250308 @default.
- W2078030149 hasConceptScore W2078030149C177801218 @default.
- W2078030149 hasConceptScore W2078030149C178790620 @default.
- W2078030149 hasConceptScore W2078030149C179104552 @default.
- W2078030149 hasConceptScore W2078030149C185592680 @default.
- W2078030149 hasConceptScore W2078030149C187937830 @default.
- W2078030149 hasConceptScore W2078030149C192562407 @default.
- W2078030149 hasConceptScore W2078030149C204787440 @default.
- W2078030149 hasConceptScore W2078030149C2776382133 @default.
- W2078030149 hasConceptScore W2078030149C2776910235 @default.
- W2078030149 hasConceptScore W2078030149C2777431650 @default.
- W2078030149 hasConceptScore W2078030149C2780740191 @default.
- W2078030149 hasConceptScore W2078030149C30646810 @default.
- W2078030149 hasConceptScore W2078030149C42360764 @default.
- W2078030149 hasConceptScore W2078030149C506065880 @default.
- W2078030149 hasConceptScore W2078030149C537208039 @default.
- W2078030149 hasConceptScore W2078030149C544956773 @default.
- W2078030149 hasConceptScore W2078030149C57410435 @default.
- W2078030149 hasConceptScore W2078030149C71924100 @default.
- W2078030149 hasConceptScore W2078030149C97355855 @default.
- W2078030149 hasIssue "11" @default.
- W2078030149 hasLocation W20780301491 @default.
- W2078030149 hasOpenAccess W2078030149 @default.
- W2078030149 hasPrimaryLocation W20780301491 @default.
- W2078030149 hasRelatedWork W1979986265 @default.
- W2078030149 hasRelatedWork W2045479671 @default.
- W2078030149 hasRelatedWork W2049452823 @default.
- W2078030149 hasRelatedWork W2091404124 @default.
- W2078030149 hasRelatedWork W2363824009 @default.
- W2078030149 hasRelatedWork W2376876696 @default.
- W2078030149 hasRelatedWork W2529274693 @default.
- W2078030149 hasRelatedWork W2905146671 @default.
- W2078030149 hasRelatedWork W1671887702 @default.
- W2078030149 hasRelatedWork W2181704607 @default.
- W2078030149 hasVolume "140" @default.
- W2078030149 isParatext "false" @default.
- W2078030149 isRetracted "false" @default.
- W2078030149 magId "2078030149" @default.
- W2078030149 workType "article" @default.