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• W2078043437 abstract "The characteristics of femtosecond laser ablation of AlN and Al₂O₃for precision microfabrication are studied experimentally. Specifically, the process characteristics during femtosecond laser drilling of microholes with sub-100 μm diameter are investigated for varying laser parameters and beam path designs for trepanning. The accumulation of sub-micrometer size particles within the hole is prevented using a blower and vent system. Through process optimization the microdrilling with good hole quality is achieved." @default.
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• W2078043437 date "2008-02-07" @default.
• W2078043437 modified "2023-10-03" @default.
• W2078043437 title "Precision microfabrication of AlN and Al 2 O 3 ceramics by femtosecond laser ablation" @default.
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• W2078043437 doi "https://doi.org/10.1117/12.762701" @default.
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