Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078085352> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2078085352 endingPage "138" @default.
- W2078085352 startingPage "136" @default.
- W2078085352 abstract "The polishing of sapphire with colloidal silica has been studied. Stock removal rates have been found to vary with the solids content in the polishing fluid and the temperature on the polishing pad. The pH of the polishing fluid has also been found to be a factor influencing removal rate. Because concentrated silica solutions are unstable at high temperatures, a compromise between temperature and concentration must be made. Still, practical removal rates over 25 μ/hr have been achieved. Work damage, an important factor in polishing operations, has been found to extend about 1.0–1.5 mils into the surface of commercially available sawn or ground sapphire blanks. When all embedded diamond from the slicing and grinding operations is removed prior to polishing, a scratch‐free, featureless surface is produced on which high quality, epitaxial silicon films can be deposited. C‐MOS devices built into the films without the use of any specific processing technique to minimize the effect of the interface showed n‐channel leakage of with negligible wafer‐to‐wafer variations (1). The polishing of sapphire by colloidal silica is believed to follow a chemical reaction leading to aluminum silicate dihydrate as described in previous literature. For the reaction" @default.
- W2078085352 created "2016-06-24" @default.
- W2078085352 creator A5034937727 @default.
- W2078085352 creator A5050307265 @default.
- W2078085352 date "1978-01-01" @default.
- W2078085352 modified "2023-10-10" @default.
- W2078085352 title "Polishing of Sapphire with Colloidal Silica" @default.
- W2078085352 doi "https://doi.org/10.1149/1.2131378" @default.
- W2078085352 hasPublicationYear "1978" @default.
- W2078085352 type Work @default.
- W2078085352 sameAs 2078085352 @default.
- W2078085352 citedByCount "52" @default.
- W2078085352 countsByYear W20780853522012 @default.
- W2078085352 countsByYear W20780853522013 @default.
- W2078085352 countsByYear W20780853522014 @default.
- W2078085352 countsByYear W20780853522015 @default.
- W2078085352 countsByYear W20780853522016 @default.
- W2078085352 countsByYear W20780853522017 @default.
- W2078085352 countsByYear W20780853522018 @default.
- W2078085352 countsByYear W20780853522019 @default.
- W2078085352 countsByYear W20780853522020 @default.
- W2078085352 countsByYear W20780853522021 @default.
- W2078085352 countsByYear W20780853522022 @default.
- W2078085352 countsByYear W20780853522023 @default.
- W2078085352 crossrefType "journal-article" @default.
- W2078085352 hasAuthorship W2078085352A5034937727 @default.
- W2078085352 hasAuthorship W2078085352A5050307265 @default.
- W2078085352 hasBestOaLocation W20780853521 @default.
- W2078085352 hasConcept C120665830 @default.
- W2078085352 hasConcept C121332964 @default.
- W2078085352 hasConcept C127413603 @default.
- W2078085352 hasConcept C138113353 @default.
- W2078085352 hasConcept C159985019 @default.
- W2078085352 hasConcept C160671074 @default.
- W2078085352 hasConcept C191897082 @default.
- W2078085352 hasConcept C192562407 @default.
- W2078085352 hasConcept C2776190703 @default.
- W2078085352 hasConcept C2776921476 @default.
- W2078085352 hasConcept C2777335606 @default.
- W2078085352 hasConcept C2777571299 @default.
- W2078085352 hasConcept C2778024142 @default.
- W2078085352 hasConcept C2780064504 @default.
- W2078085352 hasConcept C2781448156 @default.
- W2078085352 hasConcept C42360764 @default.
- W2078085352 hasConcept C49040817 @default.
- W2078085352 hasConcept C520434653 @default.
- W2078085352 hasConcept C544956773 @default.
- W2078085352 hasConcept C59789625 @default.
- W2078085352 hasConcept C78519656 @default.
- W2078085352 hasConceptScore W2078085352C120665830 @default.
- W2078085352 hasConceptScore W2078085352C121332964 @default.
- W2078085352 hasConceptScore W2078085352C127413603 @default.
- W2078085352 hasConceptScore W2078085352C138113353 @default.
- W2078085352 hasConceptScore W2078085352C159985019 @default.
- W2078085352 hasConceptScore W2078085352C160671074 @default.
- W2078085352 hasConceptScore W2078085352C191897082 @default.
- W2078085352 hasConceptScore W2078085352C192562407 @default.
- W2078085352 hasConceptScore W2078085352C2776190703 @default.
- W2078085352 hasConceptScore W2078085352C2776921476 @default.
- W2078085352 hasConceptScore W2078085352C2777335606 @default.
- W2078085352 hasConceptScore W2078085352C2777571299 @default.
- W2078085352 hasConceptScore W2078085352C2778024142 @default.
- W2078085352 hasConceptScore W2078085352C2780064504 @default.
- W2078085352 hasConceptScore W2078085352C2781448156 @default.
- W2078085352 hasConceptScore W2078085352C42360764 @default.
- W2078085352 hasConceptScore W2078085352C49040817 @default.
- W2078085352 hasConceptScore W2078085352C520434653 @default.
- W2078085352 hasConceptScore W2078085352C544956773 @default.
- W2078085352 hasConceptScore W2078085352C59789625 @default.
- W2078085352 hasConceptScore W2078085352C78519656 @default.
- W2078085352 hasIssue "1" @default.
- W2078085352 hasLocation W20780853521 @default.
- W2078085352 hasOpenAccess W2078085352 @default.
- W2078085352 hasPrimaryLocation W20780853521 @default.
- W2078085352 hasRelatedWork W2078085352 @default.
- W2078085352 hasRelatedWork W2111738570 @default.
- W2078085352 hasRelatedWork W2140195173 @default.
- W2078085352 hasRelatedWork W2354917875 @default.
- W2078085352 hasRelatedWork W2378765456 @default.
- W2078085352 hasRelatedWork W263904045 @default.
- W2078085352 hasRelatedWork W3028104419 @default.
- W2078085352 hasRelatedWork W4200014828 @default.
- W2078085352 hasRelatedWork W4200438868 @default.
- W2078085352 hasRelatedWork W4213158168 @default.
- W2078085352 hasVolume "125" @default.
- W2078085352 isParatext "false" @default.
- W2078085352 isRetracted "false" @default.
- W2078085352 magId "2078085352" @default.
- W2078085352 workType "article" @default.