FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078126362> ?p ?o ?g. }

• W2078126362 endingPage "88" @default.
• W2078126362 startingPage "81" @default.
• W2078126362 abstract "A process that used chemical vapor deposition (CVD) from the mixture of trichlorosilane (SiHCl3) and silicon tetrachloride (SiCl4) for the production of polysilicon granules in a fluidized bed reactor (FBR) was studied. The effects of the reaction temperature (800–1200 °C), molar ratio of H2 to SiHCl3 and SiCl4, and SiHCl3 fraction in the mixture of SiHCl3 and SiCl4 (0–100%) were studied. The reactant gas was analyzed by a gas chromatography (GC). The surface morphology of the product particles were analyzed by scanning electron microscopy. Well grown product particles were obtained. The reaction temperature and reactant composition significantly affected the Si yield and the amount of produced SiCl4 per kg deposited Si. The results showed that zero net by-production of SiCl4 could be realized by using the mixture of SiHCl3 and SiCl4 as reactant in a FBR while a satisfactory Si yield was remained. A suitable reaction condition for this was 1200 °C and molar ratio H2/SiHCl3/SiCl4 was 16/0.5/0.5. The corresponding one-through SiHCl3 conversion and Si yield were 21.1% and 9.6%, respectively, which were higher than the improved Siemens technology using pure SiHCl3." @default.
• W2078126362 created "2016-06-24" @default.
• W2078126362 creator A5013893930 @default.
• W2078126362 creator A5030210043 @default.
• W2078126362 creator A5048862323 @default.
• W2078126362 creator A5072187328 @default.
• W2078126362 date "2013-03-01" @default.
• W2078126362 modified "2023-10-12" @default.
• W2078126362 title "Recycling of SiCl4 in the manufacture of granular polysilicon in a fluidized bed reactor" @default.
• W2078126362 cites W1969097426 @default.
• W2078126362 cites W1981763136 @default.
• W2078126362 cites W1997254692 @default.
• W2078126362 cites W1998478809 @default.
• W2078126362 cites W2010186559 @default.
• W2078126362 cites W2011768642 @default.
• W2078126362 cites W2011915198 @default.
• W2078126362 cites W2013753399 @default.
• W2078126362 cites W2019271136 @default.
• W2078126362 cites W2047700632 @default.
• W2078126362 cites W2056535435 @default.
• W2078126362 cites W2070660920 @default.
• W2078126362 cites W2072724353 @default.
• W2078126362 cites W2072830554 @default.
• W2078126362 cites W2073738802 @default.
• W2078126362 cites W2075906465 @default.
• W2078126362 cites W2081058433 @default.
• W2078126362 cites W2103533250 @default.
• W2078126362 cites W2125956692 @default.
• W2078126362 doi "https://doi.org/10.1016/j.cej.2013.01.001" @default.
• W2078126362 hasPublicationYear "2013" @default.
• W2078126362 type Work @default.
• W2078126362 sameAs 2078126362 @default.
• W2078126362 citedByCount "30" @default.
• W2078126362 countsByYear W20781263622014 @default.
• W2078126362 countsByYear W20781263622015 @default.
• W2078126362 countsByYear W20781263622016 @default.
• W2078126362 countsByYear W20781263622017 @default.
• W2078126362 countsByYear W20781263622018 @default.
• W2078126362 countsByYear W20781263622019 @default.
• W2078126362 countsByYear W20781263622020 @default.
• W2078126362 countsByYear W20781263622021 @default.
• W2078126362 countsByYear W20781263622022 @default.
• W2078126362 countsByYear W20781263622023 @default.
• W2078126362 crossrefType "journal-article" @default.
• W2078126362 hasAuthorship W2078126362A5013893930 @default.
• W2078126362 hasAuthorship W2078126362A5030210043 @default.
• W2078126362 hasAuthorship W2078126362A5048862323 @default.
• W2078126362 hasAuthorship W2078126362A5072187328 @default.
• W2078126362 hasConcept C127413603 @default.
• W2078126362 hasConcept C134121241 @default.
• W2078126362 hasConcept C13965031 @default.
• W2078126362 hasConcept C159985019 @default.
• W2078126362 hasConcept C161790260 @default.
• W2078126362 hasConcept C171250308 @default.
• W2078126362 hasConcept C178790620 @default.
• W2078126362 hasConcept C185592680 @default.
• W2078126362 hasConcept C191897082 @default.
• W2078126362 hasConcept C192562407 @default.
• W2078126362 hasConcept C2084832 @default.
• W2078126362 hasConcept C26771246 @default.
• W2078126362 hasConcept C2776412973 @default.
• W2078126362 hasConcept C2779248272 @default.
• W2078126362 hasConcept C2994067411 @default.
• W2078126362 hasConcept C42360764 @default.
• W2078126362 hasConcept C544956773 @default.
• W2078126362 hasConcept C57410435 @default.
• W2078126362 hasConceptScore W2078126362C127413603 @default.
• W2078126362 hasConceptScore W2078126362C134121241 @default.
• W2078126362 hasConceptScore W2078126362C13965031 @default.
• W2078126362 hasConceptScore W2078126362C159985019 @default.
• W2078126362 hasConceptScore W2078126362C161790260 @default.
• W2078126362 hasConceptScore W2078126362C171250308 @default.
• W2078126362 hasConceptScore W2078126362C178790620 @default.
• W2078126362 hasConceptScore W2078126362C185592680 @default.
• W2078126362 hasConceptScore W2078126362C191897082 @default.
• W2078126362 hasConceptScore W2078126362C192562407 @default.
• W2078126362 hasConceptScore W2078126362C2084832 @default.
• W2078126362 hasConceptScore W2078126362C26771246 @default.
• W2078126362 hasConceptScore W2078126362C2776412973 @default.
• W2078126362 hasConceptScore W2078126362C2779248272 @default.
• W2078126362 hasConceptScore W2078126362C2994067411 @default.
• W2078126362 hasConceptScore W2078126362C42360764 @default.
• W2078126362 hasConceptScore W2078126362C544956773 @default.
• W2078126362 hasConceptScore W2078126362C57410435 @default.
• W2078126362 hasLocation W20781263621 @default.
• W2078126362 hasOpenAccess W2078126362 @default.
• W2078126362 hasPrimaryLocation W20781263621 @default.
• W2078126362 hasRelatedWork W1972959082 @default.
• W2078126362 hasRelatedWork W2094218724 @default.
• W2078126362 hasRelatedWork W2363307594 @default.
• W2078126362 hasRelatedWork W2363932795 @default.
• W2078126362 hasRelatedWork W2388137557 @default.
• W2078126362 hasRelatedWork W2391879157 @default.
• W2078126362 hasRelatedWork W2393228223 @default.
• W2078126362 hasRelatedWork W2394505022 @default.
• W2078126362 hasRelatedWork W2396362698 @default.
• W2078126362 hasRelatedWork W2949960234 @default.
• W2078126362 hasVolume "220" @default.

• next