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- W2078191008 abstract "Reactive ion etching (RIE) is developed by employing NF3 gas in order to avoid the fluorocarbon contamination on the Si surface exposed to the plasma. A high SiO2 etch rate is achieved with magnetically enhanced RIE because of efficient species generation. An anisotropic etching profile of SiO2 is obtained due to the low pressure and low temperature operation. The reaction layers on Si surfaces are investigated by x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy. It is found that the NF3 plasma etching is more effective to maintain a clean surface than the CHF3 plasma etching. In addition the photoresist which is used as a mask during via-hole etching is easily removed without any residues by O2 plasma ashing because the fluorocarbon contamination is avoided." @default.
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- W2078191008 date "1992-02-01" @default.
- W2078191008 modified "2023-09-23" @default.
- W2078191008 title "<title>Surface contamination control during plasma etching</title>" @default.
- W2078191008 doi "https://doi.org/10.1117/12.56914" @default.
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