Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078199929> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2078199929 endingPage "3023" @default.
- W2078199929 startingPage "3018" @default.
- W2078199929 abstract "Low-temperature (550–600 °C) formation of a Si-on-insulator structure by a solid-phase process is investigated. A microprobe (μ) reflection high-energy electron diffraction observation reveals that oriented crystal growth propagates from the seeding area in solid-phase epitaxy (SPE). The effects of random nucleation, epitaxial alignment, and local doping on lateral (L)-SPE are examined. As a result, a relatively large L-SPE area, 14 μm from the seeding area, is achieved on insulating regions. Crystal quality and electrical properties of L-SPE layers are examined using μ-Raman spectroscopy and field-effect transistor fabrication. A small stress field, 2.5×109 dyn/cm2, and high electron mobility, 720 cm2/V s, comparable to that of bulk Si are obtained." @default.
- W2078199929 created "2016-06-24" @default.
- W2078199929 creator A5007833014 @default.
- W2078199929 creator A5039574219 @default.
- W2078199929 creator A5056595282 @default.
- W2078199929 creator A5079750710 @default.
- W2078199929 date "1988-09-15" @default.
- W2078199929 modified "2023-10-16" @default.
- W2078199929 title "Low-temperature SOI (Si-on-insulator) formation by lateral solid-phase epitaxy" @default.
- W2078199929 cites W1968056645 @default.
- W2078199929 cites W1968554527 @default.
- W2078199929 cites W1983118729 @default.
- W2078199929 cites W1996815969 @default.
- W2078199929 cites W2000467057 @default.
- W2078199929 cites W2007127043 @default.
- W2078199929 cites W2007729243 @default.
- W2078199929 cites W2011002734 @default.
- W2078199929 cites W2020495440 @default.
- W2078199929 cites W2024137968 @default.
- W2078199929 cites W2027288659 @default.
- W2078199929 cites W2031821436 @default.
- W2078199929 cites W2037264333 @default.
- W2078199929 cites W2053400087 @default.
- W2078199929 cites W2055199649 @default.
- W2078199929 cites W2058815746 @default.
- W2078199929 doi "https://doi.org/10.1063/1.341565" @default.
- W2078199929 hasPublicationYear "1988" @default.
- W2078199929 type Work @default.
- W2078199929 sameAs 2078199929 @default.
- W2078199929 citedByCount "37" @default.
- W2078199929 countsByYear W20781999292012 @default.
- W2078199929 countsByYear W20781999292014 @default.
- W2078199929 countsByYear W20781999292019 @default.
- W2078199929 countsByYear W20781999292021 @default.
- W2078199929 crossrefType "journal-article" @default.
- W2078199929 hasAuthorship W2078199929A5007833014 @default.
- W2078199929 hasAuthorship W2078199929A5039574219 @default.
- W2078199929 hasAuthorship W2078199929A5056595282 @default.
- W2078199929 hasAuthorship W2078199929A5079750710 @default.
- W2078199929 hasConcept C110738630 @default.
- W2078199929 hasConcept C113196181 @default.
- W2078199929 hasConcept C120665830 @default.
- W2078199929 hasConcept C121332964 @default.
- W2078199929 hasConcept C171250308 @default.
- W2078199929 hasConcept C178790620 @default.
- W2078199929 hasConcept C185592680 @default.
- W2078199929 hasConcept C192562407 @default.
- W2078199929 hasConcept C199360897 @default.
- W2078199929 hasConcept C2779227376 @default.
- W2078199929 hasConcept C2781285689 @default.
- W2078199929 hasConcept C40003534 @default.
- W2078199929 hasConcept C41008148 @default.
- W2078199929 hasConcept C43617362 @default.
- W2078199929 hasConcept C49040817 @default.
- W2078199929 hasConcept C53143962 @default.
- W2078199929 hasConcept C544956773 @default.
- W2078199929 hasConcept C57863236 @default.
- W2078199929 hasConcept C61048295 @default.
- W2078199929 hasConceptScore W2078199929C110738630 @default.
- W2078199929 hasConceptScore W2078199929C113196181 @default.
- W2078199929 hasConceptScore W2078199929C120665830 @default.
- W2078199929 hasConceptScore W2078199929C121332964 @default.
- W2078199929 hasConceptScore W2078199929C171250308 @default.
- W2078199929 hasConceptScore W2078199929C178790620 @default.
- W2078199929 hasConceptScore W2078199929C185592680 @default.
- W2078199929 hasConceptScore W2078199929C192562407 @default.
- W2078199929 hasConceptScore W2078199929C199360897 @default.
- W2078199929 hasConceptScore W2078199929C2779227376 @default.
- W2078199929 hasConceptScore W2078199929C2781285689 @default.
- W2078199929 hasConceptScore W2078199929C40003534 @default.
- W2078199929 hasConceptScore W2078199929C41008148 @default.
- W2078199929 hasConceptScore W2078199929C43617362 @default.
- W2078199929 hasConceptScore W2078199929C49040817 @default.
- W2078199929 hasConceptScore W2078199929C53143962 @default.
- W2078199929 hasConceptScore W2078199929C544956773 @default.
- W2078199929 hasConceptScore W2078199929C57863236 @default.
- W2078199929 hasConceptScore W2078199929C61048295 @default.
- W2078199929 hasIssue "6" @default.
- W2078199929 hasLocation W20781999291 @default.
- W2078199929 hasOpenAccess W2078199929 @default.
- W2078199929 hasPrimaryLocation W20781999291 @default.
- W2078199929 hasRelatedWork W1996340404 @default.
- W2078199929 hasRelatedWork W2017035144 @default.
- W2078199929 hasRelatedWork W2028148868 @default.
- W2078199929 hasRelatedWork W2035653113 @default.
- W2078199929 hasRelatedWork W2043945689 @default.
- W2078199929 hasRelatedWork W2061052759 @default.
- W2078199929 hasRelatedWork W2105103762 @default.
- W2078199929 hasRelatedWork W2743194952 @default.
- W2078199929 hasRelatedWork W3173369041 @default.
- W2078199929 hasRelatedWork W3101164444 @default.
- W2078199929 hasVolume "64" @default.
- W2078199929 isParatext "false" @default.
- W2078199929 isRetracted "false" @default.
- W2078199929 magId "2078199929" @default.
- W2078199929 workType "article" @default.