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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078201439> ?p ?o ?g. }

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• W2078201439 startingPage "8148" @default.
• W2078201439 abstract "This article proposes an enhanced oxidation model for scanning probe microscope (SPM) nanolithography that reproduces the power-of-time law reported for tip-induced anodic oxidation. It is shown that the space charge resulting from nonstoichiometric states strongly limits the oxidation rate. The direct relationship between the oxide thickness and time is provided by integration of the oxide rate equation. Measurements on SPM-induced oxides generated on a titanium surface are compared to theory. The predominant role of the space charge is corroborated by electrical measurements on oxide barriers that exhibit current fluctuations due to Coulombic effects." @default.
• W2078201439 created "2016-06-24" @default.
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• W2078201439 date "2000-06-01" @default.
• W2078201439 modified "2023-10-12" @default.
• W2078201439 title "Kinetics of scanned probe oxidation: Space-charge limited growth" @default.
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• W2078201439 doi "https://doi.org/10.1063/1.373510" @default.
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