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- W2078207246 abstract "Laser direct-write and doping technique (LDWD) is used to introduce variations in electric properties of wide band gap materials such as SiC and diamond. Conductive, p-type doped, n-type doped and insulative tracks are created on different diamond and SiC substrates using this method. The effects of various processing parameters such as laser-matter interaction time, number of repeated exposures, and type of irradiation environment are investigated. SEM, SIMS, XPS and Raman spectroscopy are used to study the effect of laser irradiation on the microstructure, chemical binding and to obtain dopant depth profile in the substrates, respectively. LDWD technique proved to enhance the dopant (nitrogen) diffusivity into SiC resulted in a diffusion coefficient (available in paper)that is four orders of magnitudes faster than the reported value (5 x 10<sup>-12</sup> cm<sup>2</sup>s<sup>-1</sup>). Process modeling is conducted to study the atomistic of laser-doping process and to utilize laser irradiation to increase both dopant penetration and concentration. Laser doping of nitrogen alters the Raman spectrum of the 4H-SiC suggesting that Raman spectroscopy can be used as a non-contact method to characterize the laser-doped SiC." @default.
- W2078207246 created "2016-06-24" @default.
- W2078207246 creator A5029559163 @default.
- W2078207246 creator A5057862146 @default.
- W2078207246 creator A5090515850 @default.
- W2078207246 date "2003-03-03" @default.
- W2078207246 modified "2023-09-27" @default.
- W2078207246 title "Laser microprocessing of wide bandgap materials" @default.
- W2078207246 doi "https://doi.org/10.1117/12.486496" @default.
- W2078207246 hasPublicationYear "2003" @default.
- W2078207246 type Work @default.
- W2078207246 sameAs 2078207246 @default.
- W2078207246 citedByCount "0" @default.
- W2078207246 crossrefType "proceedings-article" @default.
- W2078207246 hasAuthorship W2078207246A5029559163 @default.
- W2078207246 hasAuthorship W2078207246A5057862146 @default.
- W2078207246 hasAuthorship W2078207246A5090515850 @default.
- W2078207246 hasConcept C111337013 @default.
- W2078207246 hasConcept C113196181 @default.
- W2078207246 hasConcept C120665830 @default.
- W2078207246 hasConcept C121332964 @default.
- W2078207246 hasConcept C127413603 @default.
- W2078207246 hasConcept C159985019 @default.
- W2078207246 hasConcept C175708663 @default.
- W2078207246 hasConcept C181966813 @default.
- W2078207246 hasConcept C185544564 @default.
- W2078207246 hasConcept C185592680 @default.
- W2078207246 hasConcept C191952053 @default.
- W2078207246 hasConcept C192562407 @default.
- W2078207246 hasConcept C2776921476 @default.
- W2078207246 hasConcept C37668627 @default.
- W2078207246 hasConcept C40003534 @default.
- W2078207246 hasConcept C42360764 @default.
- W2078207246 hasConcept C43617362 @default.
- W2078207246 hasConcept C49040817 @default.
- W2078207246 hasConcept C520434653 @default.
- W2078207246 hasConcept C57863236 @default.
- W2078207246 hasConcept C62520636 @default.
- W2078207246 hasConceptScore W2078207246C111337013 @default.
- W2078207246 hasConceptScore W2078207246C113196181 @default.
- W2078207246 hasConceptScore W2078207246C120665830 @default.
- W2078207246 hasConceptScore W2078207246C121332964 @default.
- W2078207246 hasConceptScore W2078207246C127413603 @default.
- W2078207246 hasConceptScore W2078207246C159985019 @default.
- W2078207246 hasConceptScore W2078207246C175708663 @default.
- W2078207246 hasConceptScore W2078207246C181966813 @default.
- W2078207246 hasConceptScore W2078207246C185544564 @default.
- W2078207246 hasConceptScore W2078207246C185592680 @default.
- W2078207246 hasConceptScore W2078207246C191952053 @default.
- W2078207246 hasConceptScore W2078207246C192562407 @default.
- W2078207246 hasConceptScore W2078207246C2776921476 @default.
- W2078207246 hasConceptScore W2078207246C37668627 @default.
- W2078207246 hasConceptScore W2078207246C40003534 @default.
- W2078207246 hasConceptScore W2078207246C42360764 @default.
- W2078207246 hasConceptScore W2078207246C43617362 @default.
- W2078207246 hasConceptScore W2078207246C49040817 @default.
- W2078207246 hasConceptScore W2078207246C520434653 @default.
- W2078207246 hasConceptScore W2078207246C57863236 @default.
- W2078207246 hasConceptScore W2078207246C62520636 @default.
- W2078207246 hasLocation W20782072461 @default.
- W2078207246 hasOpenAccess W2078207246 @default.
- W2078207246 hasPrimaryLocation W20782072461 @default.
- W2078207246 hasRelatedWork W1967375723 @default.
- W2078207246 hasRelatedWork W1977561991 @default.
- W2078207246 hasRelatedWork W2010302203 @default.
- W2078207246 hasRelatedWork W2093839221 @default.
- W2078207246 hasRelatedWork W2135903362 @default.
- W2078207246 hasRelatedWork W2232108758 @default.
- W2078207246 hasRelatedWork W2362047912 @default.
- W2078207246 hasRelatedWork W2565819627 @default.
- W2078207246 hasRelatedWork W2962969834 @default.
- W2078207246 hasRelatedWork W2783980848 @default.
- W2078207246 isParatext "false" @default.
- W2078207246 isRetracted "false" @default.
- W2078207246 magId "2078207246" @default.
- W2078207246 workType "article" @default.