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- W2078264218 abstract "In a photolithographic system, the mask patterns are imaged through a set of lenses on a resist-coated wafer. The image of mask patterns physically can be viewed as the interference of the plane waves of the diffraction spectrum captured by the lens set incident on the wafer plane at a spectrum of angles. Two-beam interference fringe is the simplest format of the image. Consequently, two-beam interferometric lithography is often employed for photolithographic researches. For two-beam interferometric lithography, beam pointing instability of the illumination source can induce fringe displacement, which results in a loss of fringe contrast if it happens during the exposure. Since some extent of beam pointing instability is not avoidable, it is necessary to investigate its effects on the contrast of the interference fringe. In this paper, the effects of beam pointing instability associated with a two-beam interferometric lithography setup are analyzed. Using geometrical ray tracing technique and basic interference theory, the relationship between the beam tilt angle and interference fringe displacement is established. For a beam pointing instability with random distribution, the resulted fringe contrast is directly proportional to the Fourier transform of the pointing distribution evaluated at 1/(2π). The effect of a pointing instability with normal distribution on interference contrast is numerically investigated." @default.
- W2078264218 created "2016-06-24" @default.
- W2078264218 creator A5022838965 @default.
- W2078264218 creator A5053148607 @default.
- W2078264218 creator A5086547736 @default.
- W2078264218 creator A5087522609 @default.
- W2078264218 date "2006-03-10" @default.
- W2078264218 modified "2023-09-23" @default.
- W2078264218 title "Effects of beam pointing instability on two-beam interferometric lithography" @default.
- W2078264218 cites W1979064951 @default.
- W2078264218 cites W1996151105 @default.
- W2078264218 cites W2011929650 @default.
- W2078264218 cites W2035503155 @default.
- W2078264218 cites W2043046648 @default.
- W2078264218 cites W2070389003 @default.
- W2078264218 cites W2070658569 @default.
- W2078264218 cites W2083762784 @default.
- W2078264218 cites W2500771091 @default.
- W2078264218 doi "https://doi.org/10.1117/12.656698" @default.
- W2078264218 hasPublicationYear "2006" @default.
- W2078264218 type Work @default.
- W2078264218 sameAs 2078264218 @default.
- W2078264218 citedByCount "0" @default.
- W2078264218 crossrefType "proceedings-article" @default.
- W2078264218 hasAuthorship W2078264218A5022838965 @default.
- W2078264218 hasAuthorship W2078264218A5053148607 @default.
- W2078264218 hasAuthorship W2078264218A5086547736 @default.
- W2078264218 hasAuthorship W2078264218A5087522609 @default.
- W2078264218 hasBestOaLocation W20782642182 @default.
- W2078264218 hasConcept C120665830 @default.
- W2078264218 hasConcept C121332964 @default.
- W2078264218 hasConcept C127162648 @default.
- W2078264218 hasConcept C136525101 @default.
- W2078264218 hasConcept C142724271 @default.
- W2078264218 hasConcept C159395582 @default.
- W2078264218 hasConcept C166689943 @default.
- W2078264218 hasConcept C168834538 @default.
- W2078264218 hasConcept C192562407 @default.
- W2078264218 hasConcept C204223013 @default.
- W2078264218 hasConcept C204787440 @default.
- W2078264218 hasConcept C207114421 @default.
- W2078264218 hasConcept C207821765 @default.
- W2078264218 hasConcept C2524010 @default.
- W2078264218 hasConcept C2779844322 @default.
- W2078264218 hasConcept C31258907 @default.
- W2078264218 hasConcept C32022120 @default.
- W2078264218 hasConcept C33923547 @default.
- W2078264218 hasConcept C41008148 @default.
- W2078264218 hasConcept C57879066 @default.
- W2078264218 hasConcept C71924100 @default.
- W2078264218 hasConceptScore W2078264218C120665830 @default.
- W2078264218 hasConceptScore W2078264218C121332964 @default.
- W2078264218 hasConceptScore W2078264218C127162648 @default.
- W2078264218 hasConceptScore W2078264218C136525101 @default.
- W2078264218 hasConceptScore W2078264218C142724271 @default.
- W2078264218 hasConceptScore W2078264218C159395582 @default.
- W2078264218 hasConceptScore W2078264218C166689943 @default.
- W2078264218 hasConceptScore W2078264218C168834538 @default.
- W2078264218 hasConceptScore W2078264218C192562407 @default.
- W2078264218 hasConceptScore W2078264218C204223013 @default.
- W2078264218 hasConceptScore W2078264218C204787440 @default.
- W2078264218 hasConceptScore W2078264218C207114421 @default.
- W2078264218 hasConceptScore W2078264218C207821765 @default.
- W2078264218 hasConceptScore W2078264218C2524010 @default.
- W2078264218 hasConceptScore W2078264218C2779844322 @default.
- W2078264218 hasConceptScore W2078264218C31258907 @default.
- W2078264218 hasConceptScore W2078264218C32022120 @default.
- W2078264218 hasConceptScore W2078264218C33923547 @default.
- W2078264218 hasConceptScore W2078264218C41008148 @default.
- W2078264218 hasConceptScore W2078264218C57879066 @default.
- W2078264218 hasConceptScore W2078264218C71924100 @default.
- W2078264218 hasLocation W20782642181 @default.
- W2078264218 hasLocation W20782642182 @default.
- W2078264218 hasOpenAccess W2078264218 @default.
- W2078264218 hasPrimaryLocation W20782642181 @default.
- W2078264218 hasRelatedWork W1983999302 @default.
- W2078264218 hasRelatedWork W2024006036 @default.
- W2078264218 hasRelatedWork W2076403196 @default.
- W2078264218 hasRelatedWork W2084655580 @default.
- W2078264218 hasRelatedWork W2772531006 @default.
- W2078264218 hasRelatedWork W2889019637 @default.
- W2078264218 hasRelatedWork W4284988287 @default.
- W2078264218 hasRelatedWork W4318154235 @default.
- W2078264218 hasRelatedWork W4321273561 @default.
- W2078264218 hasRelatedWork W2037902489 @default.
- W2078264218 isParatext "false" @default.
- W2078264218 isRetracted "false" @default.
- W2078264218 magId "2078264218" @default.
- W2078264218 workType "article" @default.