FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078269750> ?p ?o ?g. }

• W2078269750 endingPage "2753" @default.
• W2078269750 startingPage "2748" @default.
• W2078269750 abstract "Plasma etching of the widegap materials SiC and GaN is very important as there are only limited wet etches available. However, this is known to introduce defects into surface layers under typical etch conditions for widegap materials. Bulk defects are also present in these materials. We have conducted a series of experiments to compare the effects on electrical transport of surface and bulk damage. It is known that reactive ion etching a surface prior to Schottky metal deposition leads to degraded junction behaviour and our experiments confirm this. We have also irradiated these materials in a relativistic proton beam to induce additional bulk defects. For Schottky metal deposition after irradiation the usual effects of significant surface damage are observed. For deposition prior to irradiation the static I-V characteristics show only some degradation. Raman spectroscopy, which is usually sensitive to structural changes in the material subsurface region, shows, surprisingly, little change due to the high-energy proton bombardment. We conclude that even though there may be significant levels of bulk defects in widegap materials, transport is most sensitive to surface damage and it is very important to minimize the effects of any dry etch damage to obtain the best possible device performance." @default.
• W2078269750 created "2016-06-24" @default.
• W2078269750 creator A5021255482 @default.
• W2078269750 creator A5025735096 @default.
• W2078269750 creator A5032356212 @default.
• W2078269750 creator A5032450309 @default.
• W2078269750 creator A5034029173 @default.
• W2078269750 creator A5058826760 @default.
• W2078269750 creator A5075376635 @default.
• W2078269750 creator A5075894620 @default.
• W2078269750 creator A5076208198 @default.
• W2078269750 creator A5077860363 @default.
• W2078269750 creator A5078053736 @default.
• W2078269750 creator A5088938775 @default.
• W2078269750 date "2001-09-05" @default.
• W2078269750 modified "2023-10-17" @default.
• W2078269750 title "Probing bulk and surface damage in widegap semiconductors" @default.
• W2078269750 cites W1965111243 @default.
• W2078269750 cites W1965144950 @default.
• W2078269750 cites W1974432228 @default.
• W2078269750 cites W1978544266 @default.
• W2078269750 cites W1988220938 @default.
• W2078269750 cites W2020450847 @default.
• W2078269750 cites W2080346030 @default.
• W2078269750 cites W2092973069 @default.
• W2078269750 cites W2416982242 @default.
• W2078269750 doi "https://doi.org/10.1088/0022-3727/34/18/306" @default.
• W2078269750 hasPublicationYear "2001" @default.
• W2078269750 type Work @default.
• W2078269750 sameAs 2078269750 @default.
• W2078269750 citedByCount "13" @default.
• W2078269750 countsByYear W20782697502013 @default.
• W2078269750 countsByYear W20782697502020 @default.
• W2078269750 countsByYear W20782697502022 @default.
• W2078269750 countsByYear W20782697502023 @default.
• W2078269750 crossrefType "journal-article" @default.
• W2078269750 hasAuthorship W2078269750A5021255482 @default.
• W2078269750 hasAuthorship W2078269750A5025735096 @default.
• W2078269750 hasAuthorship W2078269750A5032356212 @default.
• W2078269750 hasAuthorship W2078269750A5032450309 @default.
• W2078269750 hasAuthorship W2078269750A5034029173 @default.
• W2078269750 hasAuthorship W2078269750A5058826760 @default.
• W2078269750 hasAuthorship W2078269750A5075376635 @default.
• W2078269750 hasAuthorship W2078269750A5075894620 @default.
• W2078269750 hasAuthorship W2078269750A5076208198 @default.
• W2078269750 hasAuthorship W2078269750A5077860363 @default.
• W2078269750 hasAuthorship W2078269750A5078053736 @default.
• W2078269750 hasAuthorship W2078269750A5088938775 @default.
• W2078269750 hasConcept C100460472 @default.
• W2078269750 hasConcept C108225325 @default.
• W2078269750 hasConcept C111337013 @default.
• W2078269750 hasConcept C120665830 @default.
• W2078269750 hasConcept C121332964 @default.
• W2078269750 hasConcept C130472188 @default.
• W2078269750 hasConcept C151730666 @default.
• W2078269750 hasConcept C159985019 @default.
• W2078269750 hasConcept C16115445 @default.
• W2078269750 hasConcept C185544564 @default.
• W2078269750 hasConcept C192562407 @default.
• W2078269750 hasConcept C205200001 @default.
• W2078269750 hasConcept C2779227376 @default.
• W2078269750 hasConcept C2816523 @default.
• W2078269750 hasConcept C40003534 @default.
• W2078269750 hasConcept C49040817 @default.
• W2078269750 hasConcept C54516573 @default.
• W2078269750 hasConcept C62520636 @default.
• W2078269750 hasConcept C64297162 @default.
• W2078269750 hasConcept C78434282 @default.
• W2078269750 hasConcept C86803240 @default.
• W2078269750 hasConceptScore W2078269750C100460472 @default.
• W2078269750 hasConceptScore W2078269750C108225325 @default.
• W2078269750 hasConceptScore W2078269750C111337013 @default.
• W2078269750 hasConceptScore W2078269750C120665830 @default.
• W2078269750 hasConceptScore W2078269750C121332964 @default.
• W2078269750 hasConceptScore W2078269750C130472188 @default.
• W2078269750 hasConceptScore W2078269750C151730666 @default.
• W2078269750 hasConceptScore W2078269750C159985019 @default.
• W2078269750 hasConceptScore W2078269750C16115445 @default.
• W2078269750 hasConceptScore W2078269750C185544564 @default.
• W2078269750 hasConceptScore W2078269750C192562407 @default.
• W2078269750 hasConceptScore W2078269750C205200001 @default.
• W2078269750 hasConceptScore W2078269750C2779227376 @default.
• W2078269750 hasConceptScore W2078269750C2816523 @default.
• W2078269750 hasConceptScore W2078269750C40003534 @default.
• W2078269750 hasConceptScore W2078269750C49040817 @default.
• W2078269750 hasConceptScore W2078269750C54516573 @default.
• W2078269750 hasConceptScore W2078269750C62520636 @default.
• W2078269750 hasConceptScore W2078269750C64297162 @default.
• W2078269750 hasConceptScore W2078269750C78434282 @default.
• W2078269750 hasConceptScore W2078269750C86803240 @default.
• W2078269750 hasIssue "18" @default.
• W2078269750 hasLocation W20782697501 @default.
• W2078269750 hasOpenAccess W2078269750 @default.
• W2078269750 hasPrimaryLocation W20782697501 @default.
• W2078269750 hasRelatedWork W1588407833 @default.
• W2078269750 hasRelatedWork W1977506915 @default.
• W2078269750 hasRelatedWork W2008254648 @default.
• W2078269750 hasRelatedWork W2081914540 @default.

• next