Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078290420> ?p ?o ?g. }
- W2078290420 endingPage "10134" @default.
- W2078290420 startingPage "10128" @default.
- W2078290420 abstract "Al2O3 films were deposited by the atomic layer deposition (ALD) technique onto pure copper at temperatures in the range 100–200 °C. The chemical composition, microstructure, and mechanic properties of the ALD-deposited Al2O3 films were systematically analyzed. The variations in the film characteristics with substrate temperature were observed. Oxidation trials revealed that 20-nm-thick Al2O3 films deposited at a substrate temperature as low as 100 °C suppress oxidative attack on pure copper. The Al2O3 films also showed excellent durability of adhesion strength, according to predictions using the Coffin–Manson model based on the results of accelerated temperature cycling tests. These features indicate that ALD-deposited Al2O3 film is a very promising candidate to be a protective coating for pure copper." @default.
- W2078290420 created "2016-06-24" @default.
- W2078290420 creator A5011584792 @default.
- W2078290420 creator A5025781814 @default.
- W2078290420 creator A5045887396 @default.
- W2078290420 creator A5058289619 @default.
- W2078290420 creator A5079816002 @default.
- W2078290420 date "2012-10-01" @default.
- W2078290420 modified "2023-09-27" @default.
- W2078290420 title "Improvement of oxidation resistance of copper by atomic layer deposition" @default.
- W2078290420 cites W1645764499 @default.
- W2078290420 cites W1665344004 @default.
- W2078290420 cites W1932474876 @default.
- W2078290420 cites W1964376562 @default.
- W2078290420 cites W1989189480 @default.
- W2078290420 cites W1990150424 @default.
- W2078290420 cites W1992870691 @default.
- W2078290420 cites W1995191254 @default.
- W2078290420 cites W1999731392 @default.
- W2078290420 cites W2008404895 @default.
- W2078290420 cites W2020577860 @default.
- W2078290420 cites W2026715291 @default.
- W2078290420 cites W2043135033 @default.
- W2078290420 cites W2048909194 @default.
- W2078290420 cites W2053762275 @default.
- W2078290420 cites W2057149175 @default.
- W2078290420 cites W2059528450 @default.
- W2078290420 cites W2076306638 @default.
- W2078290420 cites W2151212164 @default.
- W2078290420 cites W2158932701 @default.
- W2078290420 cites W2314146966 @default.
- W2078290420 cites W2470357878 @default.
- W2078290420 cites W4243166999 @default.
- W2078290420 doi "https://doi.org/10.1016/j.apsusc.2012.06.090" @default.
- W2078290420 hasPublicationYear "2012" @default.
- W2078290420 type Work @default.
- W2078290420 sameAs 2078290420 @default.
- W2078290420 citedByCount "28" @default.
- W2078290420 countsByYear W20782904202013 @default.
- W2078290420 countsByYear W20782904202014 @default.
- W2078290420 countsByYear W20782904202015 @default.
- W2078290420 countsByYear W20782904202016 @default.
- W2078290420 countsByYear W20782904202017 @default.
- W2078290420 countsByYear W20782904202018 @default.
- W2078290420 countsByYear W20782904202019 @default.
- W2078290420 countsByYear W20782904202020 @default.
- W2078290420 countsByYear W20782904202021 @default.
- W2078290420 countsByYear W20782904202022 @default.
- W2078290420 countsByYear W20782904202023 @default.
- W2078290420 crossrefType "journal-article" @default.
- W2078290420 hasAuthorship W2078290420A5011584792 @default.
- W2078290420 hasAuthorship W2078290420A5025781814 @default.
- W2078290420 hasAuthorship W2078290420A5045887396 @default.
- W2078290420 hasAuthorship W2078290420A5058289619 @default.
- W2078290420 hasAuthorship W2078290420A5079816002 @default.
- W2078290420 hasConcept C111368507 @default.
- W2078290420 hasConcept C121332964 @default.
- W2078290420 hasConcept C127313418 @default.
- W2078290420 hasConcept C127413603 @default.
- W2078290420 hasConcept C151730666 @default.
- W2078290420 hasConcept C153294291 @default.
- W2078290420 hasConcept C159985019 @default.
- W2078290420 hasConcept C171250308 @default.
- W2078290420 hasConcept C177564732 @default.
- W2078290420 hasConcept C19067145 @default.
- W2078290420 hasConcept C191897082 @default.
- W2078290420 hasConcept C192562407 @default.
- W2078290420 hasConcept C204530211 @default.
- W2078290420 hasConcept C2777289219 @default.
- W2078290420 hasConcept C2779227376 @default.
- W2078290420 hasConcept C2781448156 @default.
- W2078290420 hasConcept C2816523 @default.
- W2078290420 hasConcept C42360764 @default.
- W2078290420 hasConcept C544778455 @default.
- W2078290420 hasConcept C64297162 @default.
- W2078290420 hasConcept C69544855 @default.
- W2078290420 hasConcept C86803240 @default.
- W2078290420 hasConcept C87976508 @default.
- W2078290420 hasConceptScore W2078290420C111368507 @default.
- W2078290420 hasConceptScore W2078290420C121332964 @default.
- W2078290420 hasConceptScore W2078290420C127313418 @default.
- W2078290420 hasConceptScore W2078290420C127413603 @default.
- W2078290420 hasConceptScore W2078290420C151730666 @default.
- W2078290420 hasConceptScore W2078290420C153294291 @default.
- W2078290420 hasConceptScore W2078290420C159985019 @default.
- W2078290420 hasConceptScore W2078290420C171250308 @default.
- W2078290420 hasConceptScore W2078290420C177564732 @default.
- W2078290420 hasConceptScore W2078290420C19067145 @default.
- W2078290420 hasConceptScore W2078290420C191897082 @default.
- W2078290420 hasConceptScore W2078290420C192562407 @default.
- W2078290420 hasConceptScore W2078290420C204530211 @default.
- W2078290420 hasConceptScore W2078290420C2777289219 @default.
- W2078290420 hasConceptScore W2078290420C2779227376 @default.
- W2078290420 hasConceptScore W2078290420C2781448156 @default.
- W2078290420 hasConceptScore W2078290420C2816523 @default.
- W2078290420 hasConceptScore W2078290420C42360764 @default.
- W2078290420 hasConceptScore W2078290420C544778455 @default.
- W2078290420 hasConceptScore W2078290420C64297162 @default.