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- W2078290495 endingPage "A245" @default.
- W2078290495 startingPage "A241" @default.
- W2078290495 abstract "X-ray reflectivity and diffuse scattering measurements at grazing incidence including 2 theta and omega scans were done using Cu K alpha 1 radiation on W/Si multilayers deposited obliquely at different angles and on W1-xSix/Si multilayers of different compositions. The reflectivity and omega scans were simulated by the Fresnel optical computational code and within the distorted-wave Born approximation, taking the vertical roughness correlation into account, respectively. The root-mean-square interface roughness increases by about 15% while lateral correlation length decreases by nearly one order of magnitude on increasing deposition angle of the W/Si multilayers up to 47 degrees . Simultaneously the vertical roughness correlation decreases, which is shown also by 2 theta scans. Thus rougher, less correlated interfaces and an increased tendency for agglomeration appear. No root-mean-square interface roughness change was detected for W1-xSix/Si multilayers with x up to x=0.67 while the lateral correlation length decreased by one order of magnitude, interfaces being more correlated vertically. The interfaces do not exhibit the fractal behaviour in either type of multilayer." @default.
- W2078290495 created "2016-06-24" @default.
- W2078290495 creator A5006335496 @default.
- W2078290495 creator A5009744659 @default.
- W2078290495 creator A5040892123 @default.
- W2078290495 creator A5065590323 @default.
- W2078290495 creator A5068281170 @default.
- W2078290495 date "1995-04-14" @default.
- W2078290495 modified "2023-10-14" @default.
- W2078290495 title "Interface study of W-Si/Si and obliquely deposited W/Si multilayers by grazing-incidence high-resolution X-ray diffraction" @default.
- W2078290495 cites W1971887344 @default.
- W2078290495 cites W1977425722 @default.
- W2078290495 cites W1986868189 @default.
- W2078290495 cites W1986909183 @default.
- W2078290495 cites W1999010788 @default.
- W2078290495 cites W2007419241 @default.
- W2078290495 cites W2033739499 @default.
- W2078290495 cites W2046346723 @default.
- W2078290495 cites W2054267930 @default.
- W2078290495 cites W2064047240 @default.
- W2078290495 cites W2068847642 @default.
- W2078290495 cites W2090459791 @default.
- W2078290495 doi "https://doi.org/10.1088/0022-3727/28/4a/047" @default.
- W2078290495 hasPublicationYear "1995" @default.
- W2078290495 type Work @default.
- W2078290495 sameAs 2078290495 @default.
- W2078290495 citedByCount "7" @default.
- W2078290495 countsByYear W20782904952014 @default.
- W2078290495 countsByYear W20782904952021 @default.
- W2078290495 crossrefType "journal-article" @default.
- W2078290495 hasAuthorship W2078290495A5006335496 @default.
- W2078290495 hasAuthorship W2078290495A5009744659 @default.
- W2078290495 hasAuthorship W2078290495A5040892123 @default.
- W2078290495 hasAuthorship W2078290495A5065590323 @default.
- W2078290495 hasAuthorship W2078290495A5068281170 @default.
- W2078290495 hasConcept C113843644 @default.
- W2078290495 hasConcept C120665830 @default.
- W2078290495 hasConcept C121332964 @default.
- W2078290495 hasConcept C138268822 @default.
- W2078290495 hasConcept C154945302 @default.
- W2078290495 hasConcept C159985019 @default.
- W2078290495 hasConcept C185592680 @default.
- W2078290495 hasConcept C192562407 @default.
- W2078290495 hasConcept C196806460 @default.
- W2078290495 hasConcept C207114421 @default.
- W2078290495 hasConcept C2779328170 @default.
- W2078290495 hasConcept C28413391 @default.
- W2078290495 hasConcept C41008148 @default.
- W2078290495 hasConcept C49040817 @default.
- W2078290495 hasConcept C50515024 @default.
- W2078290495 hasConcept C544956773 @default.
- W2078290495 hasConcept C61511704 @default.
- W2078290495 hasConcept C8010536 @default.
- W2078290495 hasConceptScore W2078290495C113843644 @default.
- W2078290495 hasConceptScore W2078290495C120665830 @default.
- W2078290495 hasConceptScore W2078290495C121332964 @default.
- W2078290495 hasConceptScore W2078290495C138268822 @default.
- W2078290495 hasConceptScore W2078290495C154945302 @default.
- W2078290495 hasConceptScore W2078290495C159985019 @default.
- W2078290495 hasConceptScore W2078290495C185592680 @default.
- W2078290495 hasConceptScore W2078290495C192562407 @default.
- W2078290495 hasConceptScore W2078290495C196806460 @default.
- W2078290495 hasConceptScore W2078290495C207114421 @default.
- W2078290495 hasConceptScore W2078290495C2779328170 @default.
- W2078290495 hasConceptScore W2078290495C28413391 @default.
- W2078290495 hasConceptScore W2078290495C41008148 @default.
- W2078290495 hasConceptScore W2078290495C49040817 @default.
- W2078290495 hasConceptScore W2078290495C50515024 @default.
- W2078290495 hasConceptScore W2078290495C544956773 @default.
- W2078290495 hasConceptScore W2078290495C61511704 @default.
- W2078290495 hasConceptScore W2078290495C8010536 @default.
- W2078290495 hasIssue "4A" @default.
- W2078290495 hasLocation W20782904951 @default.
- W2078290495 hasOpenAccess W2078290495 @default.
- W2078290495 hasPrimaryLocation W20782904951 @default.
- W2078290495 hasRelatedWork W1505960867 @default.
- W2078290495 hasRelatedWork W1583593715 @default.
- W2078290495 hasRelatedWork W1964022023 @default.
- W2078290495 hasRelatedWork W2003685085 @default.
- W2078290495 hasRelatedWork W2016767265 @default.
- W2078290495 hasRelatedWork W2031946516 @default.
- W2078290495 hasRelatedWork W2037797286 @default.
- W2078290495 hasRelatedWork W2052377941 @default.
- W2078290495 hasRelatedWork W2372514747 @default.
- W2078290495 hasRelatedWork W4247031002 @default.
- W2078290495 hasVolume "28" @default.
- W2078290495 isParatext "false" @default.
- W2078290495 isRetracted "false" @default.
- W2078290495 magId "2078290495" @default.
- W2078290495 workType "article" @default.