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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078307519> ?p ?o ?g. }

• W2078307519 endingPage "9351" @default.
• W2078307519 startingPage "9347" @default.
• W2078307519 abstract "We present an enthalpy-based model for pulsed excimer laser annealing of crystalline silicon in the melting regime that integrates into the technology computer-aided design (TCAD) suite Sentaurus Process of Synopsys. The currently one-dimensional model includes laser absorption, a transient simulation of the heat flux, melting of the surface layer, and undercooling during recrystallization. To verify the model, its predictions for a laser pulse with a duration of ∼150 ns and a wavelength of 308 nm were compared to those of a phase-field implementation of melting laser annealing by La Magna et al. The two models show a good agreement for the melt depth, melt duration, and melt front dynamics. In a second step, model predictions were compared to melt depths extracted from SIMS measurements of ion implanted and excimer-laser-annealed silicon samples. They were found to agree within the experimental error. Variation of the beam parameters indicated a strong influence of laser energy density fluctuations on the melt depth." @default.
• W2078307519 created "2016-06-24" @default.
• W2078307519 creator A5003019769 @default.
• W2078307519 creator A5009800696 @default.
• W2078307519 creator A5017080697 @default.
• W2078307519 creator A5031013981 @default.
• W2078307519 creator A5048142507 @default.
• W2078307519 creator A5048814458 @default.
• W2078307519 creator A5058180472 @default.
• W2078307519 creator A5070508711 @default.
• W2078307519 date "2012-09-01" @default.
• W2078307519 modified "2023-09-26" @default.
• W2078307519 title "Enthalpy based modeling of pulsed excimer laser annealing for process simulation" @default.
• W2078307519 cites W1975929227 @default.
• W2078307519 cites W1980746158 @default.
• W2078307519 cites W1985890096 @default.
• W2078307519 cites W1997919438 @default.
• W2078307519 cites W2041719388 @default.
• W2078307519 cites W2048961607 @default.
• W2078307519 cites W2057493549 @default.
• W2078307519 cites W2077886944 @default.
• W2078307519 doi "https://doi.org/10.1016/j.apsusc.2012.01.130" @default.
• W2078307519 hasPublicationYear "2012" @default.
• W2078307519 type Work @default.
• W2078307519 sameAs 2078307519 @default.
• W2078307519 citedByCount "8" @default.
• W2078307519 countsByYear W20783075192013 @default.
• W2078307519 countsByYear W20783075192014 @default.
• W2078307519 countsByYear W20783075192016 @default.
• W2078307519 countsByYear W20783075192018 @default.
• W2078307519 countsByYear W20783075192020 @default.
• W2078307519 countsByYear W20783075192023 @default.
• W2078307519 crossrefType "journal-article" @default.
• W2078307519 hasAuthorship W2078307519A5003019769 @default.
• W2078307519 hasAuthorship W2078307519A5009800696 @default.
• W2078307519 hasAuthorship W2078307519A5017080697 @default.
• W2078307519 hasAuthorship W2078307519A5031013981 @default.
• W2078307519 hasAuthorship W2078307519A5048142507 @default.
• W2078307519 hasAuthorship W2078307519A5048814458 @default.
• W2078307519 hasAuthorship W2078307519A5058180472 @default.
• W2078307519 hasAuthorship W2078307519A5070508711 @default.
• W2078307519 hasBestOaLocation W20783075192 @default.
• W2078307519 hasConcept C112964491 @default.
• W2078307519 hasConcept C113196181 @default.
• W2078307519 hasConcept C120665830 @default.
• W2078307519 hasConcept C121332964 @default.
• W2078307519 hasConcept C151730666 @default.
• W2078307519 hasConcept C159985019 @default.
• W2078307519 hasConcept C160671074 @default.
• W2078307519 hasConcept C185592680 @default.
• W2078307519 hasConcept C192562407 @default.
• W2078307519 hasConcept C195702682 @default.
• W2078307519 hasConcept C22078206 @default.
• W2078307519 hasConcept C2777855556 @default.
• W2078307519 hasConcept C2780477314 @default.
• W2078307519 hasConcept C43617362 @default.
• W2078307519 hasConcept C49040817 @default.
• W2078307519 hasConcept C520434653 @default.
• W2078307519 hasConcept C544956773 @default.
• W2078307519 hasConcept C86803240 @default.
• W2078307519 hasConcept C97355855 @default.
• W2078307519 hasConceptScore W2078307519C112964491 @default.
• W2078307519 hasConceptScore W2078307519C113196181 @default.
• W2078307519 hasConceptScore W2078307519C120665830 @default.
• W2078307519 hasConceptScore W2078307519C121332964 @default.
• W2078307519 hasConceptScore W2078307519C151730666 @default.
• W2078307519 hasConceptScore W2078307519C159985019 @default.
• W2078307519 hasConceptScore W2078307519C160671074 @default.
• W2078307519 hasConceptScore W2078307519C185592680 @default.
• W2078307519 hasConceptScore W2078307519C192562407 @default.
• W2078307519 hasConceptScore W2078307519C195702682 @default.
• W2078307519 hasConceptScore W2078307519C22078206 @default.
• W2078307519 hasConceptScore W2078307519C2777855556 @default.
• W2078307519 hasConceptScore W2078307519C2780477314 @default.
• W2078307519 hasConceptScore W2078307519C43617362 @default.
• W2078307519 hasConceptScore W2078307519C49040817 @default.
• W2078307519 hasConceptScore W2078307519C520434653 @default.
• W2078307519 hasConceptScore W2078307519C544956773 @default.
• W2078307519 hasConceptScore W2078307519C86803240 @default.
• W2078307519 hasConceptScore W2078307519C97355855 @default.
• W2078307519 hasIssue "23" @default.
• W2078307519 hasLocation W20783075191 @default.
• W2078307519 hasLocation W20783075192 @default.
• W2078307519 hasOpenAccess W2078307519 @default.
• W2078307519 hasPrimaryLocation W20783075191 @default.
• W2078307519 hasRelatedWork W1967978701 @default.
• W2078307519 hasRelatedWork W1992661721 @default.
• W2078307519 hasRelatedWork W2033728294 @default.
• W2078307519 hasRelatedWork W2037613988 @default.
• W2078307519 hasRelatedWork W2046361038 @default.
• W2078307519 hasRelatedWork W2079551606 @default.
• W2078307519 hasRelatedWork W2082597488 @default.
• W2078307519 hasRelatedWork W2088148334 @default.
• W2078307519 hasRelatedWork W3207734879 @default.
• W2078307519 hasRelatedWork W4362472319 @default.
• W2078307519 hasVolume "258" @default.
• W2078307519 isParatext "false" @default.
• W2078307519 isRetracted "false" @default.

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