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• W2078347637 endingPage "9392" @default.
• W2078347637 startingPage "9390" @default.
• W2078347637 abstract "In this paper, we fabricated a fluorinated organic−inorganic hybrid mold using a nonhydrolytic sol−gel process which can produce a crack-free mold without leaving any trace of solvent. No special chemical treatment of a release layer is needed because the fluorinated hybrid mold has fluorine molecules in the backbone. The other advantages of the hybrid mold are thermal stability over 300 °C. The hybrid mold produced from UV nanoimprint lithography (UV−NIL) was used as a mold for the next UV−NIL and soft lithography without requiring use of an antisticking layer. Various nanometer scale patterns including sub-100 nm patterns could be obtained from the hybrid mold. Nanopatterning processes using this low-cost mold are useful because they preserve the expensive original master." @default.
• W2078347637 created "2016-06-24" @default.
• W2078347637 creator A5014575073 @default.
• W2078347637 creator A5051144121 @default.
• W2078347637 creator A5061606728 @default.
• W2078347637 creator A5064925947 @default.
• W2078347637 creator A5077733890 @default.
• W2078347637 creator A5086224005 @default.
• W2078347637 date "2005-09-03" @default.
• W2078347637 modified "2023-10-09" @default.
• W2078347637 title "Fluorinated Organic−Inorganic Hybrid Mold as a New Stamp for Nanoimprint and Soft Lithography" @default.
• W2078347637 cites W1966062221 @default.
• W2078347637 cites W1970355604 @default.
• W2078347637 cites W1976431482 @default.
• W2078347637 cites W1976988389 @default.
• W2078347637 cites W1982372103 @default.
• W2078347637 cites W1983772203 @default.
• W2078347637 cites W2020416116 @default.
• W2078347637 cites W2024983953 @default.
• W2078347637 cites W2027453240 @default.
• W2078347637 cites W2029550915 @default.
• W2078347637 cites W2049736064 @default.
• W2078347637 cites W2053004872 @default.
• W2078347637 cites W2060548956 @default.
• W2078347637 cites W2062074587 @default.
• W2078347637 cites W2067840355 @default.
• W2078347637 cites W2071589172 @default.
• W2078347637 cites W2075818540 @default.
• W2078347637 cites W2079647138 @default.
• W2078347637 cites W2082647225 @default.
• W2078347637 cites W2088911774 @default.
• W2078347637 cites W2089457200 @default.
• W2078347637 cites W2090641759 @default.
• W2078347637 cites W2093464257 @default.
• W2078347637 cites W2119589660 @default.
• W2078347637 cites W4247419735 @default.
• W2078347637 doi "https://doi.org/10.1021/la0513205" @default.
• W2078347637 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16207009" @default.
• W2078347637 hasPublicationYear "2005" @default.
• W2078347637 type Work @default.
• W2078347637 sameAs 2078347637 @default.
• W2078347637 citedByCount "65" @default.
• W2078347637 countsByYear W20783476372012 @default.
• W2078347637 countsByYear W20783476372013 @default.
• W2078347637 countsByYear W20783476372014 @default.
• W2078347637 countsByYear W20783476372015 @default.
• W2078347637 countsByYear W20783476372016 @default.
• W2078347637 countsByYear W20783476372017 @default.
• W2078347637 countsByYear W20783476372018 @default.
• W2078347637 countsByYear W20783476372019 @default.
• W2078347637 countsByYear W20783476372022 @default.
• W2078347637 countsByYear W20783476372023 @default.
• W2078347637 crossrefType "journal-article" @default.
• W2078347637 hasAuthorship W2078347637A5014575073 @default.
• W2078347637 hasAuthorship W2078347637A5051144121 @default.
• W2078347637 hasAuthorship W2078347637A5061606728 @default.
• W2078347637 hasAuthorship W2078347637A5064925947 @default.
• W2078347637 hasAuthorship W2078347637A5077733890 @default.
• W2078347637 hasAuthorship W2078347637A5086224005 @default.
• W2078347637 hasConcept C118524077 @default.
• W2078347637 hasConcept C136525101 @default.
• W2078347637 hasConcept C142724271 @default.
• W2078347637 hasConcept C159985019 @default.
• W2078347637 hasConcept C171250308 @default.
• W2078347637 hasConcept C178790620 @default.
• W2078347637 hasConcept C185592680 @default.
• W2078347637 hasConcept C192562407 @default.
• W2078347637 hasConcept C198721007 @default.
• W2078347637 hasConcept C204223013 @default.
• W2078347637 hasConcept C204787440 @default.
• W2078347637 hasConcept C27019838 @default.
• W2078347637 hasConcept C2777046567 @default.
• W2078347637 hasConcept C2779227376 @default.
• W2078347637 hasConcept C2780566776 @default.
• W2078347637 hasConcept C49040817 @default.
• W2078347637 hasConcept C59061564 @default.
• W2078347637 hasConcept C71924100 @default.
• W2078347637 hasConceptScore W2078347637C118524077 @default.
• W2078347637 hasConceptScore W2078347637C136525101 @default.
• W2078347637 hasConceptScore W2078347637C142724271 @default.
• W2078347637 hasConceptScore W2078347637C159985019 @default.
• W2078347637 hasConceptScore W2078347637C171250308 @default.
• W2078347637 hasConceptScore W2078347637C178790620 @default.
• W2078347637 hasConceptScore W2078347637C185592680 @default.
• W2078347637 hasConceptScore W2078347637C192562407 @default.
• W2078347637 hasConceptScore W2078347637C198721007 @default.
• W2078347637 hasConceptScore W2078347637C204223013 @default.
• W2078347637 hasConceptScore W2078347637C204787440 @default.
• W2078347637 hasConceptScore W2078347637C27019838 @default.
• W2078347637 hasConceptScore W2078347637C2777046567 @default.
• W2078347637 hasConceptScore W2078347637C2779227376 @default.
• W2078347637 hasConceptScore W2078347637C2780566776 @default.
• W2078347637 hasConceptScore W2078347637C49040817 @default.
• W2078347637 hasConceptScore W2078347637C59061564 @default.
• W2078347637 hasConceptScore W2078347637C71924100 @default.
• W2078347637 hasIssue "21" @default.
• W2078347637 hasLocation W20783476371 @default.
• W2078347637 hasLocation W20783476372 @default.

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