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- W2078348045 startingPage "177" @default.
- W2078348045 abstract "Sublimated Ta(OCH3)5 gas was decomposed by KrF excimer laser under the coexistence of helium gas. The deposit obtained was strongly-oriented β-Ta2O5, which had columnar structure. It grew nearly toward the irradiation direction of the laser light." @default.
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- W2078348045 date "1990-02-01" @default.
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- W2078348045 title "A Phototropic Crystal Growth of β-Ta2O5by KrF Laser Photolysis of Ta(OCH3)5" @default.
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- W2078348045 doi "https://doi.org/10.1246/cl.1990.177" @default.
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