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- W2078391663 abstract "Excimer laser radiation with a high energy density was used for structured removal of ceramics. Patterns down to 20 μm over an extended area were generated by mask projection. For the oxides (Al203, ZrO2) a specific removal rate of 0.01 μm/(J/cm2) per pulse was determined above a threshold of 3 J/cm2, and no saturation behavior at higher energy density was observed. Non-oxidic ceramics (SiC, Si3N4, ALN, BN) show saturation at a rate close to 20 J/cm2. The short pulse ensures minimal mechanical and chemical change of the surface layer under irradiation." @default.
- W2078391663 created "2016-06-24" @default.
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- W2078391663 date "1988-10-24" @default.
- W2078391663 modified "2023-09-23" @default.
- W2078391663 title "Precision Machining Of Ceramic Materials By Excimer Laser Irradiation" @default.
- W2078391663 doi "https://doi.org/10.1117/12.947710" @default.
- W2078391663 hasPublicationYear "1988" @default.
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