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- W2078407644 abstract "For the integration of surface acoustic wave (SAW) devices with nanostructures, numerical simulations must be employed. This paper describes finite element (FEM) models for a basic periodic cell of two types of SAW devices on GaN/Si devoted for GHz applications. E-beam lithographical techniques have been used for IDT fingers of 200nm wide. On wafer measurements of S parameters have shown a good agreement with the simulation results regarding the operation frequency." @default.
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- W2078407644 date "2011-10-01" @default.
- W2078407644 modified "2023-09-23" @default.
- W2078407644 title "FEM analysis of GaN based surface acoustic wave resonators" @default.
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- W2078407644 doi "https://doi.org/10.1109/smicnd.2011.6095751" @default.
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