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• W2078429215 abstract "In this paper, we propose a method to get more homogeneous plasma in the geometrically asymmetric capacitive coupled plasma (CCP) discharge. The dielectric barrier discharge (DBD) is used for the auxiliary discharge system to improve the homogeneity of the geometrically asymmetric CCP discharge. The single Langmuir probe measurement shows that the DBD can increase the electron density in the low density volume, where the DBD electrodes are mounted, when the pressure is higher than 5 Pa. By this manner, we are able to improve the homogeneity of the plasma production and increase the overall density in the target volume. At last, the finite element simulation results show that the DC bias, applied to the DBD electrodes, can increase the homogeneity of the electron density in the CCP discharge. The simulation results show a good agreement with the experiment results." @default.
• W2078429215 created "2016-06-24" @default.
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• W2078429215 date "2014-06-01" @default.
• W2078429215 modified "2023-09-24" @default.
• W2078429215 title "Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge" @default.
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• W2078429215 doi "https://doi.org/10.1063/1.4882442" @default.
• W2078429215 hasPublicationYear "2014" @default.
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