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- W2078432531 abstract "Electrical characteristics of Si-gate MOS capacitors are correlated with Al-poly Si interdiffusion. Process parameters that influence this effect are the dopant species in the poly Si layer, the initial Si content in the metal film and the post-metallisation annealing temperature. A simple model that assumes that Al migrates completely across the poly Si in some areas, thereby shunting the Si-gate capacitor, gives good agreement with experimental CV data." @default.
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- W2078432531 date "1985-03-01" @default.
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- W2078432531 title "Influence of Al-poly Si interactions on electrical properties of MOS capacitors" @default.
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- W2078432531 doi "https://doi.org/10.1016/0378-4363(85)90580-7" @default.
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